Tactile probes for dimensional metrology with microcomponents at nanometre resolution

Measurement Science and Technology

Volumn 19, Issue 6, 2008, Pages

  Peiner, E ^a   Balke, M ^a   Doering, L ^b   Brand, U ^b  

^a TECHNICAL UNIVERSITY OF BRAUNSCHWEIG   (Germany)

^b PHYSIKALISCH TECHNISCHE BUNDESANSTALT   (Germany)

Author keywords

Bulk micromachining; Piezoresistive cantilever; Tactile probing; Tip wear; Traceable metrology

Indexed keywords

ASPECT RATIO; CALIBRATION; COMPOSITE MICROMECHANICS; MICROMACHINING; STRAIN GAGES; UNITS OF MEASUREMENT;

BULK- MICROMACHINING; PIEZO-RESISTIVE CANTILEVERS; TACTILE PROBING; TIP WEAR; TRACEABLE METROLOGY;

NANOCANTILEVERS;

EID: 46749107164     PISSN: 09570233     EISSN: 13616501     Source Type: Journal    
DOI: 10.1088/0957-0233/19/6/064001     Document Type: Article

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