Dimensional measurement of high aspect ratio micro structures with a resonating micro cantilever probe

Microsystem Technologies

Volumn 6, Issue 5, 2000, Pages 179-183

  Yamamoto, M ^a   Takeuchi, H ^a   Aoki, S ^a  

^a Matsushita Research Institute Tokyo Inc   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0348191091     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s005429900037     Document Type: Article

References (9)

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3. Masaki T et al. (1990) Micro electo-discharge machining and its applications. Proc IEEE MEMS, 21-26
4. Masuzawa T et al. (1993) Vibroscanning method for nondestructive measurement of small holes. Annals of the CIRP, 42: 589-592
5. Masuzawa T et al. (1997) Twin-probe vibroscanning method for dimensional measurement of microholes, Annals of the CIRP 46: 437-440
6. Pril WO et al. (1997) Development of a 2D probing system with nanometer resolution. American Soc Prec Eng 16: 438-442
7. Schepperie K et al. (1998) Coordinate measuring apparatus having a probe in the form of solid-state oscillator. USP5782004
8. Vachet G; Young M (1995) Critical dimension atomic force microscopy for 0.25-micrometer process development. Solid State Technology 38: 57-62
9. Yamamoto M et al. (1996) Application of vibroscanning method to on-the-machine measurement of micro electro discharge machining. Int J Japan Soc Prec Eng 30: 49-50