High-accuracy CMM metrology for micro systems

VDI Berichte

Volumn , Issue 1860, 2004, Pages

  Bos, E J C ^a,b   Delbressine, F L M ^a   Haitjema, H ^a  

^a Precision Engineering Section ^*

^b EINDHOVEN UNIVERSITY OF TECHNOLOGY   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; ATOMIC FORCE MICROSCOPY; ERROR ANALYSIS; HEAT SHIELDING; MICROELECTROMECHANICAL DEVICES; NOZZLES; OPTIMIZATION;

MICROMOTION; MICROPRODUCTS; SCANNING PROBE MICROSCOPES (SPM);

COORDINATE MEASURING MACHINES;

EID: 19744382280     PISSN: 00835560     EISSN: None     Source Type: Book Series    
DOI: None     Document Type: Conference Paper

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