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Volumn 103, Issue 12, 2008, Pages

Transmission electron microscopy studies and simulation of the indentation response of superelastic fullerenelike carbon nitride thin films

Author keywords

[No Author keywords available]

Indexed keywords

CARBON FILMS; DEFORMATION; ELECTRON MICROSCOPY; EPITAXIAL GROWTH; LITHOGRAPHY; MATERIALS SCIENCE; SILICON; SILICON WAFERS; SINGLE CRYSTALS; SOLIDS; SUBSTRATES; THICK FILMS; THIN FILMS; TRANSMISSION ELECTRON MICROSCOPY; VICKERS HARDNESS TESTING;

EID: 46449136630     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2939716     Document Type: Article
Times cited : (3)

References (29)
  • 3
    • 46449108667 scopus 로고    scopus 로고
    • International Patent Application No. PCT/EP2006/007547 (pending).
    • International Patent Application No. PCT/EP2006/007547 (pending).
  • 11
    • 0026875935 scopus 로고
    • 0884-2914 10.1557/JMR.1992.1564.
    • W. C. Oliver and G. M. Pharr, J. Mater. Res. 0884-2914 10.1557/JMR.1992.1564 7, 1564 (1992).
    • (1992) J. Mater. Res. , vol.7 , pp. 1564
    • Oliver, W.C.1    Pharr, G.M.2
  • 14
    • 46449088919 scopus 로고    scopus 로고
    • See for information about the FEM software package.
    • See www.abaqus.com for information about the FEM software package.
  • 16
    • 46449114176 scopus 로고    scopus 로고
    • See for information about the software used for analysis of the indentation data.
    • See http://www.siomec.de/filmdoctor for information about the software used for analysis of the indentation data.
  • 19
    • 5744241761 scopus 로고    scopus 로고
    • 0022-3727 10.1088/0022-3727/37/19/023.
    • N. Schwarzer, J. Phys. D 0022-3727 10.1088/0022-3727/37/19/023 37, 2761 (2004).
    • (2004) J. Phys. D , vol.37 , pp. 2761
    • Schwarzer, N.1
  • 23
    • 0027541216 scopus 로고
    • 0884-2914 10.1557/JMR.1993.0297.
    • J. S. Field and M. V. Swain, J. Mater. Res. 0884-2914 10.1557/JMR.1993.0297 8, 297 (1993).
    • (1993) J. Mater. Res. , vol.8 , pp. 297
    • Field, J.S.1    Swain, M.V.2
  • 26
    • 0018976990 scopus 로고
    • 0021-8979 10.1063/1.327714.
    • M. C. Gupta and A. C. Ruoff, J. Appl. Phys. 0021-8979 10.1063/1.327714 51, 1072 (1980).
    • (1980) J. Appl. Phys. , vol.51 , pp. 1072
    • Gupta, M.C.1    Ruoff, A.C.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.