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Volumn 202, Issue 4-7, 2007, Pages 1103-1107
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Finite element simulation of the effect of surface roughness on nanoindentation of thin films with spherical indenters
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Author keywords
CrN; FEM; Nanoindentation; PVD; Roughness; Thin films
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Indexed keywords
CHROMIUM COMPOUNDS;
ELASTIC MODULI;
FINITE ELEMENT METHOD;
MAGNETRON SPUTTERING;
NANOINDENTATION;
PLASTIC DEFORMATION;
SURFACE ROUGHNESS;
THIN FILMS;
ARITHMETIC ROUGHNESS;
SPHERICAL INDENTER;
INORGANIC COATINGS;
CHROMIUM COMPOUNDS;
ELASTIC MODULI;
FINITE ELEMENT METHOD;
INORGANIC COATINGS;
MAGNETRON SPUTTERING;
NANOINDENTATION;
PLASTIC DEFORMATION;
SURFACE ROUGHNESS;
THIN FILMS;
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EID: 36048978191
PISSN: 02578972
EISSN: None
Source Type: Journal
DOI: 10.1016/j.surfcoat.2007.07.038 Document Type: Article |
Times cited : (88)
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References (14)
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