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Volumn 103, Issue 12, 2008, Pages

Soft x-ray emission from a pulsed gas discharge in a pseudosparklike electrode geometry

Author keywords

[No Author keywords available]

Indexed keywords

ARGON; DISCHARGE (FLUID MECHANICS); ELECTRIC DISCHARGES; ELECTROLYSIS; ELECTROMAGNETIC WAVE EMISSION; FLUID MECHANICS; GEOMETRY; GLOW DISCHARGES; INERT GASES; ION BEAMS; METALLIZING; NITROGEN; OFFSHORE OIL WELL PRODUCTION; OXYGEN; PLASMA DIAGNOSTICS; PLASMAS; X RAY SCATTERING; XENON;

EID: 46449094274     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2940786     Document Type: Article
Times cited : (23)

References (17)
  • 1
    • 84960259042 scopus 로고    scopus 로고
    • edited by V. Bakshi (SPIE, Bellingham, WA); " Special cluster on extreme ultraviolet light sources for semiconductor manufacturing," J. Phys. D (2004).
    • EUV Sources for Lithography, edited by, V. Bakshi, (SPIE, Bellingham, WA, 2006); " Special cluster on extreme ultraviolet light sources for semiconductor manufacturing.," J. Phys. D 37 (2004).
    • (2006) EUV Sources for Lithography , vol.37
  • 4
    • 0001360435 scopus 로고    scopus 로고
    • 0034-6748 10.1063/1.1150041.
    • J. J. Rocca, Rev. Sci. Instrum. 0034-6748 10.1063/1.1150041 70, 3799 (1999).
    • (1999) Rev. Sci. Instrum. , vol.70 , pp. 3799
    • Rocca, J.J.1
  • 5
    • 84865040439 scopus 로고    scopus 로고
    • Proceedings of the Fifth International Conference on Dense Z-Pinches, edited by J. Davis (unpublished)
    • Yu. D. Korolev, O. B. Frants, V. G. Geyman, R. V. Ivashov, N. V. Landl, and I. A. Shemyakin, Proceedings of the Fifth International Conference on Dense Z-Pinches, 2002, edited by, J. Davis, (unpublished), pp. 149-152.
    • (2002) , pp. 149-152
    • Korolev, Yu.D.1    Frants, O.B.2    Geyman, V.G.3    Ivashov, R.V.4    Landl, N.V.5    Shemyakin, I.A.6
  • 10
    • 21844478875 scopus 로고    scopus 로고
    • AIP Conf. Proc. No. 507, edited by W. Meyer-Ilse, T. Warwick, and D. Attwood (AIP, New York)
    • P. Guttmann, B. Niemann, J. Thieme, U. Wiesemann, D. Rudolph, and G. Schmahl, X-Ray Microscopy, AIP Conf. Proc. No. 507, edited by, W. Meyer-Ilse, T. Warwick, and, D. Attwood, (AIP, New York, 2000), pp. 411-415.
    • (2000) X-Ray Microscopy , pp. 411-415
    • Guttmann, P.1    Niemann, B.2    Thieme, J.3    Wiesemann, U.4    Rudolph, D.5    Schmahl, G.6


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.