Replication of nanostructures on microstructures by intermediate film mold inserted hot embossing process

Microsystem Technologies

Volumn 14, Issue 8, 2008, Pages 1149-1155

  Lee, Hyun Sup ^a   Kwon, Tai Hun ^a   Kim, Jong Hyun ^b   Chang, Suk Sang ^b  

^a Pohang University of Science and Technology (POSTECH)   (South Korea)

^b POSTECH   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ABLATION; ALUMINUM; COMPUTER NETWORKS; LASER ABLATION; LASER APPLICATIONS; LIGHT METALS; LITHOGRAPHY; NANOSTRUCTURES; POLYMERS; PULSED LASER DEPOSITION; SHEET MOLDING COMPOUNDS;

ANODIC ALUMINUM OXIDE (AAO); HOLE PATTERNS; HOT EMBOSSING PROCESS; LITHOGRAPHIE-GALVANOFORMUNG-ABFORMUNG (LIGA) PROCESS; MICRO MILLING; MICRO SCALES; MULTI SCALE STRUCTURES; POLYMER SUBSTRATES; SIMPLE METHODS; SPRINGER (CO);

MOLDS;

EID: 45849138182     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-008-0595-2     Document Type: Article

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