UV nano embossing for polymer nano structures with non-transparent mold insert

Microsystem Technologies

Volumn 13, Issue 5-6, 2007, Pages 593-599

  Lee, Hyun Sup ^a   Kim, Dong Sung ^a   Kwon, Tai Hun ^a  

^a Pohang University of Science and Technology (POSTECH)   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ASPECT RATIO; ELECTROFORMING; MOLDS; NICKEL; ULTRAVIOLET RADIATION;

EMBOSSING MACHINES; NICKEL ELECTROFORMING; UV EMBOSSING;

NANOSTRUCTURED MATERIALS;

EID: 33847281350     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-006-0172-5     Document Type: Article

References (10)

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