Thermal stability of ultrathin titanium films on a Pt(111) substrate

Thin Solid Films

Volumn 466, Issue 1-2, 2004, Pages 123-127

  Hsieh, Shuchen ^a,b   Beck, David ^a,c   Matsumoto, Taketoshi ^a,d   Koel, Bruce E ^a  

^a UNIVERSITY OF SOUTHERN CALIFORNIA   (United States)

^b NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

^c RHK Technology Inc   (United States)

^d UNIVERSITY OF TSUKUBA   (Japan)

Author keywords

Ion scattering; Platinum; Surface and interface states; Titanium

Indexed keywords

ANNEALING; CAPACITORS; DIFFUSION; GRAIN BOUNDARIES; HELIUM; INTEGRATED CIRCUITS; MONOLAYERS; PLATINUM; RANDOM ACCESS STORAGE; SINGLE CRYSTALS; THERMODYNAMIC STABILITY; X RAY PHOTOELECTRON SPECTROSCOPY;

ION SCATTERING; SCATTERING SIGNALS; SURFACE AND INTERFACE STATES; SURFACE CONCENTRATION;

ULTRATHIN FILMS;

EID: 4544234458     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2004.03.041     Document Type: Article

References (37)

1. Zhang L.P., Kuhn M., Diebold U., Rodriguez J.A. J. Phys. Chem., B. 101:1997;4588.
2. Zhang L.P., Kuhn M., Diebold U. Surf. Sci. 371:1997;223.
3. Tsay J.S., Shern C.S. Surf. Sci. 396:1998;313.
4. Tsay J.S., Shern C.S. J. Appl. Phys. 80:1996;3777.
5. Lundgren E., Leonardelli G., Schmid M., Varga P. Surf. Sci. 498:2002;257.
6. Galeotti M., Atrei A., Bardi U., Cortigiani B., Rovida G., Torrini M. Surf. Sci. 297:1993;202.
7. Su C.W., Ho H.Y., Shern C.S., Chen R.H. Surf. Sci. 499:2002;103.
8. Sambi M., Granozzi G. Surf. Sci. 400:1998;239.
9. Barnard J.A., Ehrhardt J.J. J. Vac. Sci. Technol., A. 8:1990;4061.
10. Tsay J.S., Shern C.S. J. Vac. Sci. Technol., A, Vac. Surf. Films. 14:1996;2522.
11. Tsay J.S., Shern C.S. Chin. J. Physiol. 34:1996;130.
12. Tsay J.S., Yao Y.D., Shern C.S. Phys. Rev., B. 58:1998;3609.
13. Atrei A., Bardi U., Wu J.X., Zanazzi E., Rovida G. Surf. Sci. 290:1993;286.
14. Paffett M.T., Windham R.G. Surf. Sci. 208:1989;34.
15. Galeotti M., Atrei A., Bardi U., Rovida G., Torrini M. Surf. Sci. 313:1994;349.
16. Nashner M.S., Bondos J.C., Hostetler M.J., Gewirth A.A., Nuzzo R.G. J. Phys. Chem., B. 102:1998;6202.
17. Diebold U., Zhang L.P., Anderson J.F., Mrozek P. J. Vac. Sci. Technol., A, Vac. Surf. Films. 14:1996;1679.
18. Giani A., Mailly F., Pascal-Delannoy F., Foucaran A., Boyer A. J. Vac. Sci. Technol., A, Vac. Surf. Films. 20:2002;112.
19. Bedo G., Fannasch H., Muller R. Sens. Actuators, A, Phys. 85:2000;124.
20. Glaninger A., Jachimowicz A., Kohl F., Chabicovsky R., Urban G. Sens. Actuators, A, Phys. 85:2000;139.
21. Hung S.T., Wong S.C., Fang W.L. Sens. Actuators, A, Phys. 84:2000;70.
22. Sreenivas K., Reaney I., Maeder T., Setter N., Jagadish C., Elliman R.G. J. Appl. Phys. 75:1994;232.
23. Chung H.J., Chung S.J., Kim J.H., Woo S.L. Thin Solid Films. 394:2001;213.
24. Chung H.J., Kim J.H., Moon W.S., Park S.B., Hwang S.C., Lee M.Y., Woo S.I. Integr. Ferroelectr. 12:1996;185.
25. Olowolafe J.O., Jones R.E., Campbell A.C., Hegde R.I., Mogab C.J., Gregory R.B. J. Appl. Phys. 73:1993;1764.
26. Sinharoy S., Buhay H., Francombe M.H., Takei W.J., Doyle N.J., Rieger J.H., Lampe D.R., Stepke E. J. Vac. Sci. Technol., A, Vac. Surf. Films. 9:1991;409.
27. Scott J.F., Kammerdiner L., Parris M., Traynor S., Ottenbacher V., Shawabkeh A., Oliver W.F. J. Appl. Phys. 64:1988;787.
28. Parker L.H., Tasch A.F. IEEE Circuit Devices Mag. 6:1990;17.
29. Hase T., Sakuma T., Amanuma K., Mori T., Ochi A., Miyasaka Y. Integr. Ferroelectr. 8:1995;89.
30. Mailly F., Giani A., Bonnot R., Temple-Boyer P., Pascal-Delannoy F., Foucaran A., Boyer A. Sens. Actuators, A, Phys. 94:2001;32.
31. Lee J.S., Park H.D., Shin S.M., Park J.W. J. Mater. Sci. Lett. 16:1997;1257.
32. Li Y.D., Voss M.R., Swami N., Tsai Y.L., Koel B.E. Phys. Rev., B. 56:1997;15982.
33. Woodruff D.P., Delchar T.A. Modern Techniques of Surface Science. second edition:1994;University Press,Cambridge, Cambridge.
34. Miedema A.R. Z. Met. 69:1977;287.
35. Ruban A.V., Skeiver H.L., Norskov J.K. Phys. Rev., B. 59:1999;15990.
36. Ringler S., Janin E., Boutonnet-Kizling M., Gothelid M. Appl. Surf. Sci. 162-163:2000;190.
37. Chen W., Severin L., Gothelid M., Hammar M., Cameron S., Paul J. Phys. Rev., B. 50:1994;5620.