VCSEL collimation using self-aligned integrated polymer microlenses

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6992, Issue , 2008, Pages

  Levallois, Christophe ^a,b   Bardinal, Véronique ^a   Vergnenègre, Corinne ^a   Leïchlé, Thierry ^a   Camps, Thierry ^a   Daran, Emmanuelle ^a   Doucet, Jean Baptiste ^a  

^a UNIVERSITÉ DE TOULOUSE   (France)

^b UNIVERSITÉ DE RENNES 1   (France)

Author keywords

Micro optics; Microcantilevers; Polymer; SU 8; VCSEL

Indexed keywords

ALIGNMENT; ARCHITECTURAL DESIGN; ASPECT RATIO; CHEMICALS; CONTACT ANGLE; DIMENSIONAL STABILITY; DROP FORMATION; DROPS; ELECTRON MICROSCOPES; ELECTRON MICROSCOPY; ELECTRON OPTICS; FLUID MECHANICS; IMAGING TECHNIQUES; LASER BEAMS; LENSES; MICROLENSES; MICROSCOPIC EXAMINATION; OPTICAL INSTRUMENTS; OPTICAL MICROSCOPY; OPTICAL PROPERTIES; OPTICS; POLYMERS; PULSED LASER DEPOSITION; SCANNING; SCANNING ELECTRON MICROSCOPY; SEMICONDUCTING CADMIUM TELLURIDE; SEMICONDUCTING SILICON COMPOUNDS; SILICON; STANDARDS; SURFACE EMITTING LASERS;

(100) SILICON; (PL) PROPERTIES; CURVATURE RADIUS; HIGH ASPECT RATIO (HAR); IN ORDER; INTERMEDIATE LAYERS; LASER BEAM SHAPING; LASING WAVELENGTHS; MICRO CANTILEVERS; MICRO-OPTICS; NEGATIVE TONES; NONCONTACT (NC); OPTICAL (PET) (OPET); OPTICAL PROFILOMETRY; OPTIMAL THICKNESS; POLYMER DROPLETS; POLYMER MICROLENSES; SELF ALIGNED (SA); SELF ALIGNMENT (SA); TOP-EMITTING; VCSEL ARRAYS; WIDE-RANGE;

PHOTORESISTS;

EID: 45149120821     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.780545     Document Type: Conference Paper

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