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Volumn 13, Issue 5, 2001, Pages 424-426
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Integration of microdiffractive lens with continuous relief with vertical-cavity surface-emitting lasers using focused ion beam direct milling
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Author keywords
Bottom emitting VCSEL; Collimating; DOEs; FIB
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Indexed keywords
DIFFRACTION;
DIFFRACTIVE OPTICS;
ENERGY DISPERSIVE SPECTROSCOPY;
ION BEAMS;
SCANNING ELECTRON MICROSCOPY;
SEMICONDUCTING GALLIUM ARSENIDE;
SEMICONDUCTOR DEVICE TESTING;
SEMICONDUCTOR LASERS;
SUBSTRATES;
DIFFRACTIVE OPTICAL ELEMENTS;
FOCUSED ION BEAM DIRECT MILLING;
MICRODIFFRACTIVE LENS;
VERTICAL CAVITY SURFACE EMITTING LASERS;
LENSES;
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EID: 0035333591
PISSN: 10411135
EISSN: None
Source Type: Journal
DOI: 10.1109/68.920738 Document Type: Article |
Times cited : (34)
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References (13)
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