-
1
-
-
44949229506
-
-
B. McCullom and O. S. Peters, A New Electric Telemeter, Technology Papers, National Bureau of Standards No. 247, 17, January 4, 1924.
-
B. McCullom and O. S. Peters, "A New Electric Telemeter, "Technology Papers, National Bureau of Standards No. 247, Vol. 17, January 4, 1924.
-
-
-
-
2
-
-
0032138896
-
Micro machined Inertial Sensors
-
Aug
-
N. Yazdi, F. Ayazi and K.Najafi, "Micro machined Inertial Sensors, " Proc. IEEE, vol. 86, No. 8, Aug. 1998. pp. 1640-1659.
-
(1998)
Proc. IEEE
, vol.86
, Issue.8
, pp. 1640-1659
-
-
Yazdi, N.1
Ayazi, F.2
Najafi, K.3
-
4
-
-
0042284294
-
Full integration of a pressure-sensor system into a standard BiCMOS process
-
T. Scheiter, H. Kapels, K.-G. Oppermann, M. Steger, C. Hierold, W. M. Werner and H.- J. Timme, "Full integration of a pressure-sensor system into a standard BiCMOS process," Sens. Actuators A, vol. 67, pp. 211-214, 1998.
-
(1998)
Sens. Actuators A
, vol.67
, pp. 211-214
-
-
Scheiter, T.1
Kapels, H.2
Oppermann, K.-G.3
Steger, M.4
Hierold, C.5
Werner, W.M.6
Timme, H.J.7
-
5
-
-
0344088287
-
Polycrystalline silicon-germanium films for integrated microstructures
-
A. E. Franke, J. M. Heck, T.-J. King and R. T. Howe, " Polycrystalline silicon-germanium films for integrated microstructures," J. Microelectromech. Syst., vol. 12, pp. 160-171, 2003.
-
(2003)
J. Microelectromech. Syst
, vol.12
, pp. 160-171
-
-
Franke, A.E.1
Heck, J.M.2
King, T.-J.3
Howe, R.T.4
-
7
-
-
0032139387
-
Bulk micromachining of silicon
-
Aug
-
G. T. A. Kovacs, N. I. Maluf and K. E. Petersen, "Bulk micromachining of silicon," Proc. IEEE, vol.86, no.8, pp. 1536-1551, Aug. 1998.
-
(1998)
Proc. IEEE
, vol.86
, Issue.8
, pp. 1536-1551
-
-
Kovacs, G.T.A.1
Maluf, N.I.2
Petersen, K.E.3
-
8
-
-
0032138470
-
Surface micromachining for micro-electromechanical systems
-
Aug
-
J. M. Bustillo, R. T. Howe and R. S. Muller, "Surface micromachining for micro-electromechanical systems," Proc. IEEE, vol. 86, no.8, pp. 1552-1574, Aug.1998.
-
(1998)
Proc. IEEE
, vol.86
, Issue.8
, pp. 1552-1574
-
-
Bustillo, J.M.1
Howe, R.T.2
Muller, R.S.3
-
9
-
-
33847028640
-
Microsensor Integration Into Systems-on-Chip
-
June
-
O. Brand, "Microsensor Integration Into Systems-on-Chip", Proc. IEEE, vol. 94, No. 6, June 2006.
-
(2006)
Proc. IEEE
, vol.94
, Issue.6
-
-
Brand, O.1
-
10
-
-
0025698082
-
Capacitive silicon accelerometer with highly symmetrical design
-
H. Seidel, R. Reider, R. Kolbeck, G. Muck, W. Kupke and M. Koniger, "Capacitive silicon accelerometer with highly symmetrical design," Sensors Actuators, vol. A21/A23, pp. 312-315, 1990.
-
(1990)
Sensors Actuators
, vol.A21
, Issue.A23
, pp. 312-315
-
-
Seidel, H.1
Reider, R.2
Kolbeck, R.3
Muck, G.4
Kupke, W.5
Koniger, M.6
-
11
-
-
0002481056
-
A bulk-silicon capacitive micro accelerometer with built in over range and force feedback electrodes
-
Hilton Head Island, SC June
-
K. J. Ma, N. Yazdi and K. Najafi, "A bulk-silicon capacitive micro accelerometer with built in over range and force feedback electrodes," in Tech. Dig. Solid-State Sensors and Actuators Workshop, Hilton Head Island, SC June 1994, pp. 160-163.
-
(1994)
Tech. Dig. Solid-State Sensors and Actuators Workshop
, pp. 160-163
-
-
Ma, K.J.1
Yazdi, N.2
Najafi, K.3
-
12
-
-
0030110593
-
Surface micro machined accelerometers
-
Mar
-
B. Boser and R. T. Howe, "Surface micro machined accelerometers," IEEE, J. Solid-State Circuits, vol. 31, pp.366-375, Mar. 1996.
-
(1996)
IEEE, J. Solid-State Circuits
, vol.31
, pp. 366-375
-
-
Boser, B.1
Howe, R.T.2
-
13
-
-
0004826394
-
A micro-machined comb-drive tuning fork gyroscope for commercial applications
-
Cleveland OH
-
M. Weinberg, J. Bernstein, S.Cho, A.T.King, A. Kourepenis, P. Ward and J. Sohn, "A micro-machined comb-drive tuning fork gyroscope for commercial applications," in Proc. Sensor Expo, Cleveland OH, 1994, pp. 187-193.
-
(1994)
Proc. Sensor Expo
, pp. 187-193
-
-
Weinberg, M.1
Bernstein, J.2
Cho, S.3
King, A.T.4
Kourepenis, A.5
Ward, P.6
Sohn, J.7
-
14
-
-
0029350972
-
A micro-machined vibrating gyroscope
-
K. Tanaka, Y. Mochida, M. Sugimoto, K. Moriya, T. Hasegawa, K. Atsuchi and K. Ohwada, "A micro-machined vibrating gyroscope," Sensors Actuators A, vol. 50, pp. 111-115, 1995.
-
(1995)
Sensors Actuators A
, vol.50
, pp. 111-115
-
-
Tanaka, K.1
Mochida, Y.2
Sugimoto, M.3
Moriya, K.4
Hasegawa, T.5
Atsuchi, K.6
Ohwada, K.7
-
16
-
-
0031677957
-
A new silicon rate gyroscope
-
Heidelberg, Germany, Feb
-
W. Geiger, B. Folkmer, J. Merz, H. Sandmaier and W. Lang, "A new silicon rate gyroscope," in Proc. IEEE Micro Electro Mechanical Systems Workshop (MEMS'98), Heidelberg, Germany, Feb. 1998, pp.615-620.
-
(1998)
Proc. IEEE Micro Electro Mechanical Systems Workshop (MEMS'98)
, pp. 615-620
-
-
Geiger, W.1
Folkmer, B.2
Merz, J.3
Sandmaier, H.4
Lang, W.5
-
17
-
-
34547411233
-
-
A. Sharma, M. F. Zaman and F. Ayazi, A 0.2ş/h Micro-Gyroscope with Automatic CMOS Mode Matching, ISSCC-2007 digest of technical papers.
-
A. Sharma, M. F. Zaman and F. Ayazi, "A 0.2ş/h Micro-Gyroscope with Automatic CMOS Mode Matching," ISSCC-2007 digest of technical papers.
-
-
-
|