메뉴 건너뛰기




Volumn 37, Issue 4, 2007, Pages 199-209

Mems-based inertial systems

Author keywords

Acceleration sensor; Fail safe electronic systems; Gyro sensor; Inertial systems; MEMS technology; MEMS sensors; Systems in package

Indexed keywords


EID: 44949169879     PISSN: 03529045     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Conference Paper
Times cited : (19)

References (17)
  • 1
    • 44949229506 scopus 로고    scopus 로고
    • B. McCullom and O. S. Peters, A New Electric Telemeter, Technology Papers, National Bureau of Standards No. 247, 17, January 4, 1924.
    • B. McCullom and O. S. Peters, "A New Electric Telemeter, "Technology Papers, National Bureau of Standards No. 247, Vol. 17, January 4, 1924.
  • 2
    • 0032138896 scopus 로고    scopus 로고
    • Micro machined Inertial Sensors
    • Aug
    • N. Yazdi, F. Ayazi and K.Najafi, "Micro machined Inertial Sensors, " Proc. IEEE, vol. 86, No. 8, Aug. 1998. pp. 1640-1659.
    • (1998) Proc. IEEE , vol.86 , Issue.8 , pp. 1640-1659
    • Yazdi, N.1    Ayazi, F.2    Najafi, K.3
  • 5
    • 0344088287 scopus 로고    scopus 로고
    • Polycrystalline silicon-germanium films for integrated microstructures
    • A. E. Franke, J. M. Heck, T.-J. King and R. T. Howe, " Polycrystalline silicon-germanium films for integrated microstructures," J. Microelectromech. Syst., vol. 12, pp. 160-171, 2003.
    • (2003) J. Microelectromech. Syst , vol.12 , pp. 160-171
    • Franke, A.E.1    Heck, J.M.2    King, T.-J.3    Howe, R.T.4
  • 7
    • 0032139387 scopus 로고    scopus 로고
    • Bulk micromachining of silicon
    • Aug
    • G. T. A. Kovacs, N. I. Maluf and K. E. Petersen, "Bulk micromachining of silicon," Proc. IEEE, vol.86, no.8, pp. 1536-1551, Aug. 1998.
    • (1998) Proc. IEEE , vol.86 , Issue.8 , pp. 1536-1551
    • Kovacs, G.T.A.1    Maluf, N.I.2    Petersen, K.E.3
  • 8
    • 0032138470 scopus 로고    scopus 로고
    • Surface micromachining for micro-electromechanical systems
    • Aug
    • J. M. Bustillo, R. T. Howe and R. S. Muller, "Surface micromachining for micro-electromechanical systems," Proc. IEEE, vol. 86, no.8, pp. 1552-1574, Aug.1998.
    • (1998) Proc. IEEE , vol.86 , Issue.8 , pp. 1552-1574
    • Bustillo, J.M.1    Howe, R.T.2    Muller, R.S.3
  • 9
    • 33847028640 scopus 로고    scopus 로고
    • Microsensor Integration Into Systems-on-Chip
    • June
    • O. Brand, "Microsensor Integration Into Systems-on-Chip", Proc. IEEE, vol. 94, No. 6, June 2006.
    • (2006) Proc. IEEE , vol.94 , Issue.6
    • Brand, O.1
  • 10
    • 0025698082 scopus 로고
    • Capacitive silicon accelerometer with highly symmetrical design
    • H. Seidel, R. Reider, R. Kolbeck, G. Muck, W. Kupke and M. Koniger, "Capacitive silicon accelerometer with highly symmetrical design," Sensors Actuators, vol. A21/A23, pp. 312-315, 1990.
    • (1990) Sensors Actuators , vol.A21 , Issue.A23 , pp. 312-315
    • Seidel, H.1    Reider, R.2    Kolbeck, R.3    Muck, G.4    Kupke, W.5    Koniger, M.6
  • 11
    • 0002481056 scopus 로고
    • A bulk-silicon capacitive micro accelerometer with built in over range and force feedback electrodes
    • Hilton Head Island, SC June
    • K. J. Ma, N. Yazdi and K. Najafi, "A bulk-silicon capacitive micro accelerometer with built in over range and force feedback electrodes," in Tech. Dig. Solid-State Sensors and Actuators Workshop, Hilton Head Island, SC June 1994, pp. 160-163.
    • (1994) Tech. Dig. Solid-State Sensors and Actuators Workshop , pp. 160-163
    • Ma, K.J.1    Yazdi, N.2    Najafi, K.3
  • 12
    • 0030110593 scopus 로고    scopus 로고
    • Surface micro machined accelerometers
    • Mar
    • B. Boser and R. T. Howe, "Surface micro machined accelerometers," IEEE, J. Solid-State Circuits, vol. 31, pp.366-375, Mar. 1996.
    • (1996) IEEE, J. Solid-State Circuits , vol.31 , pp. 366-375
    • Boser, B.1    Howe, R.T.2
  • 17
    • 34547411233 scopus 로고    scopus 로고
    • A. Sharma, M. F. Zaman and F. Ayazi, A 0.2ş/h Micro-Gyroscope with Automatic CMOS Mode Matching, ISSCC-2007 digest of technical papers.
    • A. Sharma, M. F. Zaman and F. Ayazi, "A 0.2ş/h Micro-Gyroscope with Automatic CMOS Mode Matching," ISSCC-2007 digest of technical papers.


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.