Electrical and optical properties of ITO and ITO:Zr transparent conducting films

Materials Science in Semiconductor Processing

Volumn 10, Issue 6, 2007, Pages 264-269

  Zhang, Bo ^a   Dong, Xianping ^a   Xu, Xiaofeng ^b   Wang, Xinjian ^a   Wu, Jiansheng ^a  

^a BEIJING UNIVERSITY OF POSTS AND TELECOMMUNICATIONS   (China)

^b DONGHUA UNIVERSITY   (China)

Author keywords

Electrical properties; ITO; Optical band gap; Optical properties

Indexed keywords

ANNEALING; ENERGY GAP; MAGNETRON SPUTTERING; THERMAL EFFECTS;

OPTICAL BAND GAP; SUBSTRATE TEMPERATURE;

METALLIC FILMS;

EID: 44749094791     PISSN: 13698001     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mssp.2008.03.003     Document Type: Article

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