A flexible piezoelectric sensor for microfluidic applications using polyvinylidene fluoride

IEEE Sensors Journal

Volumn 8, Issue 5, 2008, Pages 495-500

  Chang, Wen Yang ^a,b   Chu, Chun Hsun ^b   Lin, Yu Cheng ^a  

^a NATIONAL CHENG KUNG UNIVERSITY   (Taiwan)

^b INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE   (Taiwan)

Author keywords

Charge amplifier; Flexible microfluidic; Frequency oscillator; Piezoelectric; Piezoelectric polyvinylidene fluoride (PVDF); Sensor

Indexed keywords

ELECTRIC CHARGE; MICROCHANNELS; MICROFLUIDICS; PIEZOELECTRIC MATERIALS; PIEZOELECTRICITY;

CHARGE AMPLIFIER; FREQUENCY OSCILLATOR; MICROFLUIDIC CHANNELS; PIEZOELECTRIC POLYVINYLIDENE FLUORIDE (PVDF);

SENSORS;

EID: 44649166350     PISSN: 1530437X     EISSN: None     Source Type: Journal    
DOI: 10.1109/JSEN.2008.918749     Document Type: Article

References (17)

1. S. Xue and G. Yin, "Proton exchange membranes based on poly(vinylidene fluoride) and sulfonated poly(ether ether ketone)," Polymer, ED, vol. 47, pp. 5044-5049, 2006.
2. A. Mokrini and M. A. Huneault, "Proton exchange membranes based on PVDF/SEBS blends," J. Power Sources, vol. ED-154, pp. 51-58, 2006.
3. J. Jang, "Displays develop a new flexibility," Materials Today, vol. ED-9, pp. 46-52, 2006.
4. R. A. Street, W. S. Wong, S. E. Ready, M. L. Chabinyc, A. C. Arias, S. Limb, A. Salleo, and R. Lujan, "Jet printing flexible displays," Materials Today, vol. ED-9, pp. 32-37, 2006.
5. L. S. Park, J. W. Park, H. Y. Choi, Y. S. Han, Y. Kwon, and H. S. Choi, "Fabrication of charged particles for electrophoretic display," Current Appl. Phys., vol. ED-6, pp. 644-648, 2006.
6. J. Collier, D. Wroblewski, and T. Bifano, "Development of a rapid-response flow-control system using MEMS microvalve arrays," J. Microelectromechan. Syst., vol. ED-13, pp. 912-922, 2004.
7. Y. Xu, C. W. Chiu, F. Jiang, Q. Lin, and Y. C. Tai, "A MEMS multi-sensor chip for gas flow sensing," Sens. Actuators, A: Phys., vol. ED-121, pp. 253-261, 2005.
8. H. Van, W. Joost, V. B. Svetovoy, T. S. Lammerink, and M. C. Elwenspoek, "Determination of the sensitivity behavior of an acoustic, thermal flow sensor by electronic characterization," Sens. Actuators, A: Phys., vol. ED-112, no. 1-9, 2004.
9. L. Scholer, B. Lange, K. Seibel, H. Schafer, M. Walder, N. Friedrich, D. Ehrhardt, F. Schonfeld, G. Zech, and M. Bohm, "Monolithically integrated micro flow sensor for lab-on-chip applications," Microelectron. Eng., vol. ED-78, pp. 164-170, 2005.
10. S. Yantao, E. Winder, X. Ning, C. A. Pomeroy, and U. C. Wejinya, "Closed-loop optimal control-enabled piezoelectric microforce sensors," IEEE/ASME Trans. Mechatron., vol. ED-11, pp. 420-427, 2006.
11. H. Matsumura, H. Sato, Y. Houshi, and S. Shoji, "All plastic microfluidic device with built-in 3-D fine microstructures," in Proc. Microprocesses Nanotechnol. Conf., Tokyo, Japan, Oct. 25-28, 2005.
12. T. Ebefors, E. Kalvesten, and G. Stemme, "Three dimensional silicon triple-hot-wire anemometer based on polyimide joints," in Proc. IEEE Micro Electro Mechan. Syst., Heidelberg, Germany, Jan. 25-29, 1998.
13. S. McNamara and Y. B. Gianchandani, "A fabrication process with high thermal isolation and vacuum sealed lead transfer for gas reactors and sampling microsystems," in Proc. IEEE 16th Ann. Int. Conf. Micro Electro Mechan. Syst., Kyoto, Japan, Jan. 19-23, 2003.
14. J. Collier, D. Wroblewski, and T. Bifano, "Development of a rapid-response flow-control system using MEMS microvalve arrays," J. Microelectromechan. Syst., vol. ED-13, pp. 912-922, 2004.
15. S. Takeuchi, Y. Yoshida, D. Ziegler, K. Mabuchi, and T. Suzuki, "Parylene flexible neural probe with micro fluidic channel," in Proc. 17th IEEE Int. Conf. Micro Electro Mechan. Syst., Maastricht, The Netherlands, Jan. 25-29, 2004.
16. Y. Yamada, I. Fujimoto, T. Morizono, Y. Umetani, T. Maeno, and D. Yamada, "Development of artificial skin surface ridges with vibrotactile sensing elements for incipient slip detection," in Proc. Int. Conf. Multisensor Fusion and Integration Intell. Syst., Baden-Baden, Germany, Aug. 20-22, 2001.
17. A. Salimi and A. A. Yousefi, "Analysis method FTIR studies of b-phase crystal formation in stretched PVDF films," Polymer Testing, vol. ED-22, pp. 699-704, 2003.