Determination of the sensitivity behavior of an acoustic, thermal flow sensor by electronic characterization

Sensors and Actuators, A: Physical

Volumn 112, Issue 1, 2004, Pages 1-9

  Van Honschoten, Joost W ^a   Svetovoy, V B ^b   Lammerink, T S J ^a   Krijnen, G J M ^a   Elwenspoek, M C ^a  

^a UNIVERSITY OF TWENTE   (Netherlands)

^b RUSSIAN ACADEMY OF SCIENCES   (Russian Federation)

Author keywords

Acoustic sensors; Calibration; Electronic characterization; MEMS; Thermal flow sensors

Indexed keywords

ACOUSTICS; BOUNDARY CONDITIONS; EIGENVALUES AND EIGENFUNCTIONS; ELECTRIC RESISTANCE; GREEN'S FUNCTION; HEAT TRANSFER; MATHEMATICAL MODELS; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; SPECIFIC HEAT; TRANSFER FUNCTIONS;

ACOUSTIC SENSORS; ELECTRONIC CHARACTERIZATION; MEMS; THERMAL FLOW SENSORS;

SENSORS;

EID: 2142662940     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2003.10.016     Document Type: Article

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