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Volumn 9, Issue 2, 2008, Pages 180-183

Growth and structural properties of β-Ga2O3 thin films on GaN substrates by an oxygen plasma treatment

Author keywords

Ga2O3 thin film; GaN substrate; Oxidation; Plasma treatment

Indexed keywords

EID: 44649152820 PISSN: 12299162 EISSN: None Source Type: Journal
DOI: None Document Type: Article

Times cited : (7)

References (10)

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