Fabrication of three-dimensional nanostructures by focused ion beam milling

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 26, Issue 3, 2008, Pages 973-977

  Tjerkstra, R W ^a   Segerink, F B ^a   Kelly, J J ^b   Vos, W L ^a,c  

^a UNIVERSITY OF TWENTE   (Netherlands)

^b UTRECHT UNIVERSITY   (Netherlands)

^c FOM INSTITUTE AMOLF   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

FOCUSED ION BEAMS; GALLIUM PHOSPHIDE; PARTICLE SIZE; PHOTONIC CRYSTALS; SINGLE CRYSTALS; THREE DIMENSIONAL;

FOCUSED ION BEAM MILLING; IDENTICAL PATTERNS; THREE-DIMENSIONAL NANOSTRUCTURES;

NANOSTRUCTURES;

EID: 44649101306     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2912079     Document Type: Article

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