Fabrication of functional structures on thin silicon nitride membranes

Microelectronic Engineering

Volumn 67-68, Issue , 2003, Pages 422-429

  Ekkels, P ^a   Tjerkstra, R W ^a   Krijnen, G J M ^a   Berenschot, J W ^a   Brugger, J ^b   Elwenspoek, M C ^a  

^a UNIVERSITY OF TWENTE   (Netherlands)

^b EPFL   (Switzerland)

Author keywords

Electrostatic actuation; Nanopatterning; Surface micromachining

Indexed keywords

CHEMICAL VAPOR DEPOSITION; DOPING (ADDITIVES); ETCHING; FABRICATION; MEMBRANES; POLYSILICON; ROTORS; STATORS;

MICROACTUATION;

INTEGRATED CIRCUITS;

EID: 0038359099     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0167-9317(03)00098-4     Document Type: Conference Paper

References (9)

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