Effects of dynamic recovery on amorphization kinetics in 6H-SiC

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 266, Issue 12-13, 2008, Pages 2793-2796

  Weber, William J ^a   Wang, Lumin ^b   Zhang, Yanwen ^a   Jiang, Weilin ^a   Bae, In Tae ^a  

^a PACIFIC NORTHWEST NATIONAL LABORATORY   (United States)

^b UNIVERSITY OF MICHIGAN   (United States)

Author keywords

Amorphization; Ionization effects; Irradiation effects; Recovery; Silicon carbide

Indexed keywords

ACTIVATION ENERGY; AMORPHIZATION; DYNAMIC MODELS; HYDROGEN; IONIZATION; THERMAL EFFECTS;

IONIZATION EFFECTS; IRRADIATION EFFECTS;

SILICON CARBIDE;

EID: 44649093272     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2008.03.119     Document Type: Article

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