Effect of ionization rates on dynamic recovery processes during electron-beam irradiation of 6H-SiC

Applied Physics Letters

Volumn 90, Issue 12, 2007, Pages

  Bae, In Tae ^a   Weber, William J ^a   Ishimaru, Manabu ^b   Hirotsu, Yoshihiko ^b  

^a PACIFIC NORTHWEST NATIONAL LABORATORY   (United States)

^b OSAKA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHIZATION; ELECTRON BEAMS; IONIZATION; SURFACE DEFECTS; THERMAL EFFECTS;

DYNAMIC RECOVERY; ELECTRON BEAM IRRADIATIONS; IONIZATION ENHANCED RECOVERY; IONIZATION RATES;

ELECTRON IRRADIATION;

EID: 33947579769     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2715135     Document Type: Article

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