High-Q LIGA-MEMS vertical cantilever variable capacitors for upper microwave frequencies

Microwave and Optical Technology Letters

Volumn 42, Issue 6, 2004, Pages 507-511

  Haluzan, Darcy T ^a,b   Klymyshyn, David M ^a,b  

^a TRLabs   (Canada)

^b UNIVERSITY OF SASKATCHEWAN   (Canada)

Author keywords

LIGA; MEMS; Microwave; Variable capacitor; X ray lithography

Indexed keywords

ACTUATORS; CAPACITANCE; CAPACITORS; COMPUTER SIMULATION; MICROWAVES; NATURAL FREQUENCIES; Q FACTOR MEASUREMENT; TUNING; VOLTAGE CONTROL; X RAY LITHOGRAPHY;

LIGA; MICROWAVE FREQUENCIES; SHUNT-MOUNTED CAPACITORS; VARIABLE CAPACITORS;

MICROELECTROMECHANICAL DEVICES;

EID: 4444353772     PISSN: 08952477     EISSN: None     Source Type: Journal    
DOI: 10.1002/mop.20352     Document Type: Article

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