High vertical aspect ratio LIGA microwave 3-dB coupler

Proceedings - International Conference on MEMS, NANO and Smart Systems, ICMENS 2003

Volumn , Issue , 2003, Pages 38-43

  Kachayev, A A ^a   Klymyshyn, D M ^a   Achenbach, S ^b   Saile, V ^b  

^a UNIVERSITY OF SASKATCHEWAN   (Canada)

^b KARLSRUHE INSTITUTE OF TECHNOLOGY   (Germany)

Author keywords

Conductors; Coplanar waveguides; Directional couplers; Electromagnetic waveguides; Fabrication; Microstructure; Microwave technology; Radio frequency; Synchrotrons; X ray lithography

Indexed keywords

COPLANAR WAVEGUIDES; DESIGN; DIRECTIONAL COUPLERS; ELECTRIC CONDUCTORS; FABRICATION; LITHOGRAPHY; MICROSTRUCTURE; MICROWAVE DEVICES; MICROWAVES; SYNCHROTRONS; WAVEGUIDES; X RAY LITHOGRAPHY;

DEEP X-RAY LITHOGRAPHY; ELECTROMAGNETIC WAVEGUIDES; MICROWAVE STRUCTURES; MICROWAVE TECHNOLOGY; PLANAR FABRICATION; RADIO FREQUENCIES; STRUCTURE CHARACTERISTIC;

ASPECT RATIO;

EID: 84943805050     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICMENS.2003.1221961     Document Type: Conference Paper

References (17)

1. E.W. Becker, W. Ehrfeld, P. Hagmann, A. Maner, and D. Münchmeyer, "Fabrication of Microstructures With High Aspect Ratios and Great Structural Heights by Synchrotron Radiation Lithography, Galvanoforming and Plastic Moulding (LIGA Process)," Microelec. Eng., vol. 4, pp. 35-56, 1986.
2. M. J. Madou, Fundamentals of Microfabrication: The Science of Miniaturization. CRC Press, 2002.
3. S. Achenbach, J. Mohr, F. J. Pantenburg, "Application of Scanning Probe Microscopy for the Determination of the Structural Accuracy of High Aspect Ratio Microstructures," Microelec. Eng., vol. 53, pp. 637-640, 2000.
4. R. Mongia, I. Bahl, P. Bhartia, RF and Microwave Coupled-Line Circuits. Norwood, MA: Artech House, 1999.
5. C. P. Wen, "Coplanar-Waveguide Directional Couplers," IEEE Trans. Microwave Theory Tech., vol. MTT-18, pp. 318-322, June 1970.
6. M. Ozgur, V. Milanov, C. Zincke, M. Gaitan, and M. E. Zaghloul, "Quasi-TEM Characteristic Impedance of Micromachined CMOS Coplanar Waveguides," IEEE Trans. Microwave Theory Tech., vol. MTT-48, pp. 852-854, May 2000.
7. G. Ghione, M. Goano, G. L. Madonna, G. Omegna, M. Pirola, S. Bosso, D. Frassati, and A. Perasso, "Microwave Modeling and Characterization of Thick Coplanar Waveguides on Oxide-Coated Lithium Niobate Substrates for Electrooptical Applications," IEEE Trans. Microwave Theory Tech., vol. MTT-47, pp. 2287-2293, Dec. 1999.
8. S. S. Bedair and I. Wolff, "Fast, Accurate and Simple Approximate Analytic Formulas for Calculating the Parameters of Supported Coplanar Waveguides for (M)MIC's," IEEE Trans. Microwave Theory Tech., vol. MTT-40, pp. 41-48, Jan. 1992.
9. W. Heinrich, "Quasi-TEM Description of MMIC Coplanar Lines Including Conductor-Loss Effects," IEEE Trans. Microwave Theory Tech., vol. MTT-41, pp. 45-52, Jan. 1993.
10. G. Ghione and C. U. Naldi, "Coplanar Waveguides for MMIC Applications: Effect of Upper Shielding, Conductor Backing, Finite-Extent Ground Planes, and Line-to-Line Coupling," IEEE Trans. Microwave Theory Tech., vol. MTT-35, pp. 260-267, Mar. 1987.
11. M. Goano, F. Bertazzi, P. Caravelli, G. Ghione, and T. A. Driscoll, "A General Conformal Mapping Approach to the Optimum Electrode Design of Coplanar Waveguides With Arbitrary Cross Section," IEEE Trans. Microwave Theory Tech., vol. MTT-49, pp. 1573-1580, Sep. 2001.
12. G. Ghione, M. Goano, and M. Pirola, "Exact, Conformal-Mapping Models for the High-Frequency Losses of Coplanar Waveguides with Thick Electrodes of Rectangular or Trapezoidal Cross Section," 1999 MTT-S International Microwave Symposium Digest, vol. III, pp. 1311-1314, Mar. 1999.
13. C. Veyres and V. Fouad Hanna, "Extension of the Application of Conformal Mapping Techniques to Coplanar Lines with Finite Dimensions," International Journal of Electronics, vol. 48, pp. 47-56, Jan. 1980.
14. M. E. Davis, E. W. Williams, and A. C. Celestini, "Finite-Boundary Corrections to the Coplanar Waveguide Analysis," IEEE Trans. Microwave Theory Tech. (Short Papers), vol. MTT-21, pp. 594-596, Sept. 1973.
15. J. B. Knorr and K. D. Kuchler, "Analysis of Coupled Slots and Coplanar Strips on Dielectric Substrate," IEEE Trans. Microwave Theory Tech., vol. MTT-23, pp. 541-548, July 1975.
16. E. Chen and S.Y. Chou, "Characteristics of Coplanar Transmission Lines on Multilayer Substrates: Modeling and Experiments," IEEE Trans. Microwave Theory Tech., vol. MTT-45, pp. 939-945, Jun. 1997.
17. T. Kitazawa and R. Mittra, "Quasi-Static Characteristics of Asymmetrical and Coupled Coplanar-Type Transmission Lines," IEEE Trans. Microwave Theory Tech., vol. MTT-33, pp. 771-778, Sep. 1985.