Determination of mechanical film properties of a bilayer system due to elastic indentation measurements with a spherical indenter

Thin Solid Films

Volumn 377-378, Issue , 2000, Pages 366-372

  Chudoba, T ^a   Schwarzer, N ^a   Richter, F ^a   Beck, U ^b  

^a CHEMNITZ UNIVERSITY OF TECHNOLOGY   (Germany)

^b BAM FEDERAL INSTITUTE FOR MATERIALS RESEARCH AND TESTING   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS MATERIALS; GLASS; MATHEMATICAL MODELS; MULTILAYERS; NANOSTRUCTURED MATERIALS; SILICA; SILICON NITRIDE; SURFACE ROUGHNESS; SURFACE STRUCTURE;

NANOINDENTATION;

SEMICONDUCTING FILMS;

EID: 0034515519     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(00)01365-1     Document Type: Article

References (13)

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