Optical and electrical properties of polymerizing plasmas and their correlation with DLC film properties

Plasmas and Polymers

Volumn 9, Issue 1, 2004, Pages 1-22

  Rangel, Elidiane C ^a   Da Cruz, Nilson C ^a   Kayama, Milton E ^a   Rangel, Rita C C ^a   Marins, Nazir ^b   Durrant, Steven F ^a  

^a SÃO PAULO STATE UNIVERSITY UNESP   (Brazil)

^b INSTITUTO DE PESQUISA E DESENVOLVIMENTO   (Brazil)

Author keywords

Electrical resistivity; Electron density; Electron temperature diamond like carbon; Optical emission spectroscopy; Optical gap

Indexed keywords

ELECTRON TEMPERATURE; OPTICAL EMISSION SPECTROSCOPY; OPTICAL GAP;

CARRIER CONCENTRATION; DIAMOND LIKE CARBON FILMS; ELECTRIC CONDUCTIVITY; EMISSION SPECTROSCOPY; FILM GROWTH; ION BOMBARDMENT; LIGHT EMISSION; POLYMERS; RAMAN SPECTROSCOPY; ULTRAVIOLET RADIATION;

PLASMAS;

EID: 4444269305     PISSN: 10840184     EISSN: None     Source Type: Journal    
DOI: 10.1023/B:PAPO.0000039813.33634.c6     Document Type: Article

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