A study of sheath electric fields in planar magnetron discharges using laser induced fluorescence spectroscopy

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 35, Issue 11, 1996, Pages 5858-5861

  Choi, Young Wook ^a   Bowden, Mark ^a   Muraoka, Katsunori ^a  

^a KYUSHU UNIVERSITY   (Japan)

Author keywords

Electric field; Glow discharge; Helium; Laser induced fluorescence; Magnetron; Sheaths

Indexed keywords

ELECTRIC FIELD DISTRIBUTIONS; HELIUM PLASMA MEASUREMENTS; LASER INDUCED FLUORESCENCE SPECTROSCOPY; MAGNETRON DISCHARGES;

BORON COMPOUNDS; FLUORESCENCE; GLOW DISCHARGES; HELIUM; LASER APPLICATIONS; MAGNETRON SPUTTERING; PLASMA SHEATHS; SPECTROSCOPY;

ELECTRIC FIELD MEASUREMENT;

EID: 0030283777     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.35.5858     Document Type: Article

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