Untersuchungen der Mikro- und Nanorauhigkeit von Oberflächen mittels Streulichtmessung

VDI Berichte

Volumn , Issue 1669, 2003, Pages

  Duparre A ^a,b  

^a AG Oberflächencharakterisierung ^*

^b FRAUNHOFER GESELLSCHAFT   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 4444259087     PISSN: 00835560     EISSN: None     Source Type: Book Series    
DOI: None     Document Type: Review

References (10)

1. A.Duparré, G.Nofni, "Multi-type surface and thin film characterization using light scattering, scanning force microscopy and white light interferometry", in Optical Metrology, G.A.Al-Jumaily, ed., Vol. CR 72 of SPIE Critical Review Paper Series (SPIE, Bellingham, Wash.), 213-231 (1999).
2. A.Duparré, J.Ferre-Borrull, S.Gliech, G.Notni, J.Steinert, and J.Bennett, "Surface characterization techniques for determining the root-mean-square roughness and power spectral densities of optical components", in Appl. Opt. 41, 154-171 (2002).
3. A.Duparré und S.Gliech, "Quality assessment from supersmooth to rough surfaces by multiple wavelength light scattering measurements", in Scattering and Surface Roughness, Z.Gu and A.A.Maradudin, eds., Proc. SPIE 3141, 57-64 (1997).
4. U.C.Stover, Optical Scattering: Measurement and Analysis, 2nd ed. (SPIE Press, Bellingham, Wash., 1995).
5. A.Duparré, "Light scattering of thin dielectrical films", in Thin Films for Optical Coatings, R.E.Hummel and K.H.Guenther, eds., Vol.1 of Handbook of Optical Properties Series (CRC, Boca Raton, Fla.), 273-304 (1995).
6. S.Gliech, J.Steinert, A.Duparré, "Light-scattering measurements of optical thin-film components at 157 nm and 193 nm", in Appl. Opt. 41, 3224-3235 (2002).
7. S.Gliech, H.Geßner, A.Duparré, "System for angle resolved and total light scattering, transmittance and reflectance measurements of optical components at 157 nm and 193 nm", in Proc. SPIE 4932, in print, (2002).
8. 2 for VUV optical components: roughness, surface scatter, and bulk scatter", in Proc. SPIE 4932, in print, (2002).
9. A.Duparré, M.Flemming, J.Steinert, K.Reihs, "Optical coatings with enhanced roughness for ultrahydrophobic, low-scatter applications", in Appl. Opt. 41, 3294-3298 (2002).
10. K.Reihs, A.Duparré, M.Flemming, "Optische Schichten mit ultrahydrophoben und streuarmen Eigenschaften", in Photonik, 34.Jahrgang, S. 36-38, (4/2002).