Quality assessment of supersmooth to rough surfaces by multiple-wavelength light scattering measurement

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3141, Issue , 1997, Pages 57-64

  Duparré, Angela ^a   Gliech, Stefan ^a  

^a FRAUNHOFER INSTITUTE FOR APPLIED OPTICS AND PRECISION ENGINEERING   (Germany)

Author keywords

Defect detection; Light scattering measurement; Quality control; Standardization; Surface roughness

Indexed keywords

CUSTOMER SATISFACTION; DEFECTS; FRICTION; LIGHT SCATTERING; METAL ANALYSIS; OPTICAL COATINGS; QUALITY ASSURANCE; QUALITY FUNCTION DEPLOYMENT; REFRACTION; SCATTERING; SEMICONDUCTING SILICON COMPOUNDS; SILICON WAFERS; STANDARDIZATION; SURFACE MEASUREMENT; SURFACE PROPERTIES; SURFACE ROUGHNESS; TOTAL QUALITY MANAGEMENT; TWO DIMENSIONAL;

BACKSCATTERING MEASUREMENT; DEFECT DETECTION; ENGINEERING SURFACES; LIGHT SCATTERING MEASUREMENT; QUALITY ASSESSMENTS; ROUGH SURFACES; SAMPLE SURFACES; SCATTERING DIAGRAMS; SURFACE QUALITIES;

QUALITY CONTROL;

EID: 58649107351     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.287805     Document Type: Conference Paper

References (11)

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