Application of laser scan lithography to fabrication of microcylindrical parts

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 43, Issue 6 B, 2004, Pages 4031-4035

  Joshima, Yuuki ^a   Kokubo, Tadashi ^a,b   Horiuchi, Toshiyuki ^a  

^a TOKYO DENKI UNIVERSITY   (Japan)

^b Honda Engineering Co Ltd   (Japan)

Author keywords

Cylindrical specimen; Ferric chloride solution; Laser scan exposure; Lithography; Microcomponent; Resist coating

Indexed keywords

CYLINDRICAL SPECIMEN; FERRIC CHLORIDE SOLUTION; LASER SCAN EXPOSURE; MICROCOMPONENT; RESIST COATING;

COATINGS; CONDENSATION; ELECTRIC RESISTANCE; FERRIMAGNETIC MATERIALS; LASER BEAMS; PATTERN RECOGNITION; PHOTOLITHOGRAPHY; SCANNING; THICKNESS CONTROL; ULTRAVIOLET DETECTORS; X RAY ANALYSIS;

THIN FILMS;

EID: 4444257336     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/JJAP.43.4031     Document Type: Conference Paper

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