3-D Micromachining with TIEGA Process

IEEJ Transactions on Sensors and Micromachines

Volumn 120, Issue 7, 2000, Pages 375-376

  Katoh, Takanori ^a  

^a SUMITOMO HEAVY INDUSTRIES LTD   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 85010143483     PISSN: 13418939     EISSN: 13475525     Source Type: Journal    
DOI: 10.1541/ieejsmas.120.375     Document Type: Article

References (2)

1. T. Katoh and Y. Zhang, “High Aspect Ratio Micromachinig by Synchrotron Radiation Direct Photo-Etching”, Microsystem Technologies, Vol. 4, (1998) pp. 135-138.
2. A. D. Feinerman, R. E. Lajos, V. White and D. D. Denton, “X-ray Lathe : An X-ray Lithographic Exposure Tool for Nonplanar Objects”, Journal of Microelectromecanical Systems, Vol. 5, No. 4 (1996) pp. 250-255.