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Volumn 42, Issue 6 B, 2003, Pages 4031-4036
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Low-cost and high-performance micro-fabrication method using low numerical-aperture optical projection lithography on copper-clad plastic boards
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Author keywords
Copper clad plastic board; Low NA; Micro component; Micro gear; Nickel electroplating; Optical projection lithography
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Indexed keywords
ASPECT RATIO;
ELECTROPLATING;
PLASTIC PRODUCTS;
SILICON WAFERS;
MICRO NICKEL GEARS;
PHOTOLITHOGRAPHY;
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EID: 0041861300
PISSN: 00214922
EISSN: None
Source Type: Journal
DOI: 10.1143/jjap.42.4031 Document Type: Conference Paper |
Times cited : (9)
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References (8)
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