메뉴 건너뛰기




Volumn 42, Issue 6 B, 2003, Pages 4031-4036

Low-cost and high-performance micro-fabrication method using low numerical-aperture optical projection lithography on copper-clad plastic boards

Author keywords

Copper clad plastic board; Low NA; Micro component; Micro gear; Nickel electroplating; Optical projection lithography

Indexed keywords

ASPECT RATIO; ELECTROPLATING; PLASTIC PRODUCTS; SILICON WAFERS;

EID: 0041861300     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.42.4031     Document Type: Conference Paper
Times cited : (9)

References (8)
  • 5
    • 12444307173 scopus 로고    scopus 로고
    • U. S. Patent 4882245 (1989)
    • U. S. Patent 4882245 (1989).


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.