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Volumn 289, Issue 1-3, 2001, Pages 221-227
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Study of the influence of Ar on the formation of diamond-like bonds in films obtained from CH4+Ar, RF plasma deposition
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Author keywords
[No Author keywords available]
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Indexed keywords
ADHESION;
ARGON;
AUGER ELECTRON SPECTROSCOPY;
CHEMICAL BONDS;
CONCENTRATION (PROCESS);
DIAMOND LIKE CARBON FILMS;
ELECTRIC CONDUCTIVITY;
METHANE;
MICROHARDNESS;
MORPHOLOGY;
PARTIAL PRESSURE;
PLASMA APPLICATIONS;
RAMAN SPECTROSCOPY;
SPUTTERING;
X RAY PHOTOELECTRON SPECTROSCOPY;
ELECTRICAL PROPERTIES;
PLASMA DEPOSITION;
AMORPHOUS FILMS;
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EID: 0035421537
PISSN: 00223093
EISSN: None
Source Type: Journal
DOI: 10.1016/S0022-3093(01)00713-X Document Type: Article |
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Times cited : (6)
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References (16)
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