SCOPUS 정보 검색 플랫폼

Diamond and Related Materials

Volumn 11, Issue 7, 2002, Pages 1436-1440

Microstructure of diamond-like carbon films prepared by cathodic arc deposition

(5) Kimura, Ayako a Azuma, Yasushi a Suzuki, Tetsuya a Saito, Tomohiro b Ikuhara, Yuichi c

a KEIO UNIVERSITY (Japan)

b JAPAN FINE CERAMICS CENTER (Japan)

c UNIVERSITY OF TOKYO (Japan)

Author keywords

Amorphous carbon; Chemical bonding; Microstructure; Physical vapor deposition

Indexed keywords

AMORPHOUS MATERIALS; ARGON; CARBON; DEPOSITION; ELECTRON DIFFRACTION; ELECTRON SPECTROSCOPY; ENERGY DISSIPATION; GRAPHITE ELECTRODES; HYDROGEN; METHANE; PLASMAS; VACUUM APPLICATIONS; X RAY PHOTOELECTRON SPECTROSCOPY;

AMORPHOUS CARBON FILMS; GRAPHITE CRYSTAL CATHODES;

DIAMOND LIKE CARBON FILMS;

CATHODIC ARC PLASMA DEPOSITION; CUTTING TOOL; DIAMOND-LIKE CARBON; FILM; FRICTION; MECHANICAL PROPERTY; MICROSTRUCTURE; VAPOR DEPOSITION;

EID: 0036645137 PISSN: 09259635 EISSN: None Source Type: Journal
DOI: 10.1016/S0925-9635(02)00046-8 Document Type: Article

Times cited : (5)

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