Direct patterning of nanostructured ceramics from solution-differences from conventional printing and lithographic methods

Journal of Solid State Electrochemistry

Volumn 12, Issue 7-8, 2008, Pages 775-782

  Yoshimura, Masahiro ^a   Gallage, Ruwan ^a  

^a TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

Ceramic; Film; Ink jet; Pattern; Soft chemistry; Solution

Indexed keywords

ETCHING; LITHOGRAPHY; MICROFABRICATION; NANOSTRUCTURES; PRESSURE EFFECTS; PRINTING;

PATTERNING; REACTION POINT; SOFT CHEMISTRY;

CERAMIC MATERIALS;

CERAMICS; LITHOGRAPHIC INK; PRINTING;

EID: 44349156002     PISSN: 14328488     EISSN: None     Source Type: Journal    
DOI: 10.1007/s10008-007-0493-z     Document Type: Conference Paper

References (54)

1. 1. RR Chamberlin JS Skarman 1966 J Electrochem Soc 113 86 10.1149/1.2423871 1:CAS:528:DyaF28XjtF2jsA%3D%3D Chamberlin RR, Skarman JS (1966) J Electrochem Soc 113:86
2. 2. CJ Brinker AJ Hurd GC Frye KJ Ward CS Ashley 1990 J Non-Cryst Solids 121 294 10.1016/0022-3093(90)90147-E 1:CAS:528:DyaK3cXltVajtL4%3D Brinker CJ, Hurd AJ, Frye GC, Ward KJ, Ashley CS (1990) J Non-Cryst Solids 121:294
3. 3. V Driessche G Penneman CD Meyer I Stambolova E Bruneel H Hoste 2002 Key Eng Mater 206–213 479 Driessche V, Penneman G, Meyer CD, Stambolova I, Bruneel E, Hoste H (2002) Key Eng Mater 206–213:479
4. 4. CJ Brinker GC Frye AJ Hurd CS Ashley 1991 Thin Solid Films 201 97 10.1016/0040-6090(91)90158-T 1:CAS:528:DyaK3MXkslelsbk%3D Brinker CJ, Frye GC, Hurd AJ, Ashley CS (1991) Thin Solid Films 201:97
5. 5. S Halder P Gerber T Schneller R Waser 2006 Appl Phys A 83 285 10.1007/s00339-006-3494-3 1:CAS:528:DC%2BD28XivVOgt7Y%3D Halder S, Gerber P, Schneller T, Waser R (2006) Appl Phys A 83:285
6. 6. S Deki S Iizuka M Mizuhata A Kajinami 2005 J Electroanal Chem 584 38 10.1016/j.jelechem.2004.05.027 1:CAS:528:DC%2BD2MXhtVamsbrK Deki S, Iizuka S, Mizuhata M, Kajinami A (2005) J Electroanal Chem 584:38
7. 7. PT Anastas JC Warner 1998 Green chemistry: theory and practice Oxford University Press New York Anastas PT, Warner JC (1998) Green chemistry: theory and practice. Oxford University Press, New York
8. 8. F Michel 1987 Chem Scr 28 3 Michel F (1987) Chem Scr 28:3
9. 9. S Mann 1996 Biomimetic materials chemistry Wiley New York Mann S (1996) Biomimetic materials chemistry. Wiley, New York
10. 10. S Kuroki T Kikkawa H Kochiya S Shishiguchi 2003 Jap J App Phy Part 1 42 1907 10.1143/JJAP.42.1907 1:CAS:528:DC%2BD3sXjvFehtL0%3D Kuroki S, Kikkawa T, Kochiya H, Shishiguchi S (2003) Jap J App Phy Part 1 42:1907
11. 11. S Borini AM Rossi L Boarino G Amato 2003 J Electro Chem Soc 150 G311 10.1149/1.1564109 1:CAS:528:DC%2BD3sXivFaktLg%3D Borini S, Rossi AM, Boarino L, Amato G (2003) J Electro Chem Soc 150:G311
12. 12. M Ohmukai K Okada Y Tsutsumi 2005 J Mater Sci–Mater Electron 16 119 10.1007/s10854-005-6461-4 1:CAS:528:DC%2BD2MXjtlegtrk%3D Ohmukai M, Okada K, Tsutsumi Y (2005) J Mater Sci–Mater Electron 16:119
13. 13. S Ono S Hirano 1997 J Am Ceram Soc 80 2533 10.1111/j.1151-2916.1997.tb03205.x 1:CAS:528:DyaK2sXmslejsb8%3D Ono S, Hirano S (1997) J Am Ceram Soc 80:2533
14. 14. M Yoshimura 1998 J Mater Res 13 796 10.1557/JMR.1998.0101 1:CAS:528:DyaK1cXisFegtLk%3D Yoshimura M (1998) J Mater Res 13:796
15. 15. M Yoshimura J Livage 2000 MRS Bull Spec Issue 25 12 1:CAS:528:DC%2BD3cXntFKgsbs%3D Yoshimura M, Livage J (2000) MRS Bull Spec Issue 25:12
16. 16. M Yoshimura WL Suchanek K Byrappa 2000 MRS Bull Spec Issue 25 17 1:CAS:528:DC%2BD3cXntFKgsbg%3D Yoshimura M, Suchanek WL, Byrappa K (2000) MRS Bull Spec Issue 25:17
17. 17. M Yoshimura 2006 J Mater Sci 41 1299 10.1007/s10853-006-7262-8 1:CAS:528:DC%2BD28Xit1Wls7w%3D Yoshimura M (2006) J Mater Sci 41:1299
18. 18. M Yoshimura 2006 J of the Ceram Soc of Japan 114 888 10.2109/jcersj.114.888 1:CAS:528:DC%2BD28Xht1Sls7zE Yoshimura M (2006) J of the Ceram Soc of Japan 114:888
19. 19. Y Liu T Cui K Varahramyan 2003 Solid-State Electron 47 1543 10.1016/S0038-1101(03)00082-0 1:CAS:528:DC%2BD3sXks1amsbo%3D Liu Y, Cui T, Varahramyan K (2003) Solid-State Electron 47:1543
20. 20. X Ding Y Li D Wang Q Yin 2004 Ceram Int 30 1885 10.1016/j.ceramint.2003.12.050 1:CAS:528:DC%2BD2cXmvVGmtrc%3D Ding X, Li Y, Wang D, Yin Q (2004) Ceram Int 30:1885
21. 21. DY Lee ES Hwang TU Yu YJ Kim J Hwang 2006 Appl Phys A 82 671 10.1007/s00339-005-3452-5 1:CAS:528:DC%2BD28XislKlsQ%3D%3D Lee DY, Hwang ES, Yu TU, Kim YJ, Hwang J (2006) Appl Phys A 82:671
22. 22. M Mott JRG Evans 1999 Mater Sci Eng A 271 344 10.1016/S0921-5093(99)00266-X Mott M, Evans JRG (1999) Mater Sci Eng A 271:344
23. 23. T Shimoda Y Matsuki M Furusawa T Aoki I Yudasaka H Tanaka H Iwasawa D Wang M Miyasaka Y Takeuchi 2006 Nature 440 783 10.1038/nature04613 1:CAS:528:DC%2BD28XjtFKjsLk%3D Shimoda T, Matsuki Y, Furusawa M, Aoki T, Yudasaka I, Tanaka H, Iwasawa H, Wang D, Miyasaka M, Takeuchi Y (2006) Nature 440:783
24. 24. R Danzebrink MA Aegerter 2001 Thin Solid Films 392 223 10.1016/S0040-6090(01)01031-8 1:CAS:528:DC%2BD3MXkvVOqtr0%3D Danzebrink R, Aegerter MA (2001) Thin Solid Films 392:223
25. 25. WR Cox T Chen 2001 Optics Photonics News 12 32 1:CAS:528:DC%2BD3MXkslCrs7g%3D 10.1364/OPN.12.6.000032 Cox WR, Chen T (2001) Optics Photonics News 12:32
26. 26. T Shimoda K Morii S Seki H Kiguchi 2003 MRS Bull 28 821 1:CAS:528:DC%2BD3sXpvVyjurY%3D Shimoda T, Morii K, Seki S, Kiguchi H (2003) MRS Bull 28:821
27. 27. SA Lange V Benes DP Kern JKH Horber A Bernard 2004 Anal Chem 76 1641 10.1021/ac035127w 1:CAS:528:DC%2BD2cXht1ais74%3D Lange SA, Benes V, Kern DP, Horber JKH, Bernard A (2004) Anal Chem 76:1641
28. 28. D Hayes P Cooley D Wallace 2004 Proc SPIE Int Soc Opt Eng 5416 73 Hayes D, Cooley P, Wallace D (2004) Proc SPIE Int Soc Opt Eng 5416:73
29. 29. Y Yoshioka PD Calvert GE Jabbour 2005 Macromol Rapid Commun 26 238 10.1002/marc.200400527 1:CAS:528:DC%2BD2MXitl2rsLk%3D Yoshioka Y, Calvert PD, Jabbour GE (2005) Macromol Rapid Commun 26:238
30. 30. J Wang JRG Evans 2005 J Mater Res 20 2733 10.1557/JMR.2005.0348 1:CAS:528:DC%2BD2MXhtFWju7zE Wang J, Evans JRG (2005) J Mater Res 20:2733
31. 31. E Sachs M Cima P Williams D Brancazio J Cornie 1992 J Eng Ind 114 481 10.1115/1.2900701 Sachs E, Cima M, Williams P, Brancazio D, Cornie J (1992) J Eng Ind 114:481
32. 32. X Zhao JRG Evans MJ Edirisinghe 2002 J Mater Sci 37 1987 10.1023/A:1015247131016 1:CAS:528:DC%2BD38XkvVemtbo%3D Zhao X, Evans JRG, Edirisinghe MJ (2002) J Mater Sci 37:1987
33. 33. R Noguera M Lejeune T Chartier 2005 J Eur Ceram Soc 25 2055 10.1016/j.jeurceramsoc.2005.03.223 1:CAS:528:DC%2BD2MXlt1Srur8%3D Noguera R, Lejeune M, Chartier T (2005) J Eur Ceram Soc 25:2055
34. 34. M Mott JH Song JRG Evans 1999 J Am Ceram Soc 82 1653 1:CAS:528:DyaK1MXks1Grt7c%3D Mott M, Song JH, Evans JRG (1999) J Am Ceram Soc 82:1653
35. 35. T Wang B Derby 2005 J Am Ceram Soc 88 2053 1:CAS:528:DC%2BD2MXntVaksLc%3D 10.1111/j.1551-2916.2005.00406.x Wang T, Derby B (2005) J Am Ceram Soc 88:2053
36. 36. JA Lewis JE Smay JJC Stuecker III 2006 J Am Ceram Soc 89 3599 3609 10.1111/j.1551-2916.2006.01382.x 1:CAS:528:DC%2BD28XhtlWqsrbF Lewis JA, Smay JE, Stuecker JJC III (2006) J Am Ceram Soc 89:3599–3609
37. 37. Y Sakai T Futakuchi M Adachi 2006 Jap J App Phy 45 7247 10.1143/JJAP.45.7247 1:CAS:528:DC%2BD28XhtV2hsbfO Sakai Y, Futakuchi T, Adachi M (2006) Jap J App Phy 45:7247
38. 38. AR Bhatti M Mott JRG Evans MJ Edirisinghe 2001 J Mater Sci Lett 20 1245 10.1023/A:1010987209703 1:CAS:528:DC%2BD3MXmslGqsbg%3D Bhatti AR, Mott M, Evans JRG, Edirisinghe MJ (2001) J Mater Sci Lett 20:1245
39. 39. N Ozer 2001 Sol Energy Mater Sol Cells 68 391 10.1016/S0927-0248(00)00371-8 1:CAS:528:DC%2BD3MXhslOktLg%3D Ozer N (2001) Sol Energy Mater Sol Cells 68:391
40. 40. JS Cruz GT Delgado RC Perez SJ Sandoval OJ Sandoval CIZ Romero JM Marin OZ Angel 2005 Thin Solid Films 493 83 10.1016/j.tsf.2005.07.237 1:CAS:528:DC%2BD2MXhtFekurnO Cruz JS, Delgado GT, Perez RC, Sandoval SJ, Sandoval OJ, Romero CIZ, Marin JM, Angel OZ (2005) Thin Solid Films 493:83
41. 41. R Teranishi T Fujiwara T Watanabe M Yoshimura 2002 Solid State Ionics 151 97 10.1016/S0167-2738(02)00587-8 1:CAS:528:DC%2BD38XoslCqsLw%3D Teranishi R, Fujiwara T, Watanabe T, Yoshimura M (2002) Solid State Ionics 151:97
42. 42. R Gallage R Teranishi T Fujiwara T Watanabe M Yoshimura 2007 Mater Sci Eng B 137 299 10.1016/j.mseb.2006.11.024 1:CAS:528:DC%2BD2sXhs1ymtrg%3D Gallage R, Teranishi R, Fujiwara T, Watanabe T, Yoshimura M (2007) Mater Sci Eng B 137:299
43. 43. A Matsuo R Gallage T Fujiwara T Watanabe M Yoshimura 2006 J Electroceram 16 533 10.1007/s10832-006-9912-2 1:CAS:528:DC%2BD28XhtFKgtL3N Matsuo A, Gallage R, Fujiwara T, Watanabe T, Yoshimura M (2006) J Electroceram 16:533
44. 44. Gallage R, Matsuo A, Fujiwara T, Watanabe T, Matsushita N, Yoshimura M (2008) J Am Ceram Soc (in press)
45. 45. Subramani AK, Matsushita N, Watanabe T, Tada M, Abe M, Kondo K, Yoshimura M (2007) Mater Sci Eng B (in press)
46. 46. CB Arnold A Pique 2007 MRS Bull 32 9 Arnold CB, Pique A (2007) MRS Bull 32:9
47. 47. V Kripesh W Gust SK Bhatnagar H Osterwinter 2000 Mater Lett 44 347 10.1016/S0167-577X(00)00077-X 1:CAS:528:DC%2BD3cXktlehs7s%3D Kripesh V, Gust W, Bhatnagar SK, Osterwinter H (2000) Mater Lett 44:347
48. 48. HL Marcus JW Barlow JJ Beaman 1992 Int J Powder Metall 28 369 Marcus HL, Barlow JW, Beaman JJ (1992) Int J Powder Metall 28:369
49. 49. CB Arnold P Serra A Pique 2007 MRS Bull 32 23 1:CAS:528:DC%2BD2sXjsVKlurY%3D Arnold CB, Serra P, Pique A (2007) MRS Bull 32:23
50. 50. Watanabe T, Yoshimura M (2006) Thin Solid Film 515:2696
51. 51. HB Zhu XD Li SY Huang CX Jin Z Sun YW Chen SM Huang 2006 Surf Rev Lett 13 833 10.1142/S0218625X06008918 1:CAS:528:DC%2BD2sXit12qtrw%3D Zhu HB, Li XD, Huang SY, Jin CX, Sun Z, Chen YW, Huang SM (2006) Surf Rev Lett 13:833
52. 52. P Laffez xY Chen G Banerjee T Pezeril MD Rossell GV Tendeloo P Lacorre JM Liu ZG Liu 2006 Thin Solid Films 500 27 10.1016/j.tsf.2005.10.062 1:CAS:528:DC%2BD28XhtV2qsL8%3D Laffez P, Chen xY, Banerjee G, Pezeril T, Rossell MD, Tendeloo GV, Lacorre P, Liu JM, Liu ZG (2006) Thin Solid Films 500:27
53. 53. Watanabe T, Wang H, Yamakawa Y, Yoshimura M (2006) Carbon 44:799
54. 54. SK Sengupta R Singh AK Srivastava 1998 J Electrochem Soc 145 2209 10.1149/1.1838621 1:CAS:528:DyaK1cXksVWhsrg%3D Sengupta SK, Singh R, Srivastava AK (1998) J Electrochem Soc 145:2209