Patterned porous silicon formed with photolithography

Journal of Materials Science: Materials in Electronics

Volumn 16, Issue 2, 2005, Pages 119-121

  Ohmukai, M ^a   Okada, K ^a   Tsutsumi, Y ^a  

^a NATIONAL INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

LIGHT EMISSION; OPTICAL DEVICES; PHOTOLITHOGRAPHY; PHOTOLUMINESCENCE; PHOTORESISTS; SCANNING ELECTRON MICROSCOPY; SILICON WAFERS;

LIGHT EMITTING MATERIALS; PHOTOLUMINESCENCE SPECTRA;

POROUS SILICON;

EID: 20344393895     PISSN: 09574522     EISSN: None     Source Type: Journal    
DOI: 10.1007/s10854-005-6461-4     Document Type: Article

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