Solution-processed silicon films and transistors

Nature

Volumn 440, Issue 7085, 2006, Pages 783-786

  Shimoda, Tatsuya ^a   Matsuki, Yasuo ^b   Furusawa, Masahiro ^a   Aoki, Takashi ^a   Yudasaka, Ichio ^a   Tanaka, Hideki ^a   Iwasawa, Haruo ^b   Wang, Daohai ^b   Miyasaka, Masami ^a   Takeuchi, Yasumasa ^b,c  

^a SEIKO EPSON CORPORATION   (Japan)

^b JSR CORPORATION   (Japan)

^c Intl Center for Materials Research   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS SILICON; FABRICATION; RELIABILITY; SEMICONDUCTING SILICON; SOLUTIONS; SPIN COATING; TRANSISTORS;

INK-JET PRINTING; LIQUID PRECURSOR; LIQUID-PHASE MATERIALS; METAL CHALCOGENIDE SEMICONDUCTORS; MOBILITIES; SOLUTION PROCESSES;

SEMICONDUCTOR DEVICES;

SILANE; SILICON;

COATING; DEPOSITION; FILM; MOBILITY; PHASE TRANSITION; SILICON; SOLUTION;

ARTICLE; FILM; MATERIAL COATING; PRINTING; PRIORITY JOURNAL; SEMICONDUCTOR; SOLUTION AND SOLUBILITY;

EID: 33645732989     PISSN: 00280836     EISSN: 14764687     Source Type: Journal    
DOI: 10.1038/nature04613     Document Type: Article

References (27)

1. Shimoda, T. et al. Multicolor pixel patterning of light-emitting polymers by ink-jet printing. In 1999 SID International Symposium Digest of Technical Papers 376-379 (Society for Information Display, San Jose, 1999).
2. Miyashita, S. et al. Full color displays fabricated by ink-jet printing. In Proc. 21st International Display Research Conference in Conjunction with 8th International Display Workshop (Asia Display / IDW '01) 1399-1402 (2001).
3. Peumans, P., Uchida, S. & Forrest, S. R. Efficient bulk heterojunction photovoltaic cells using small-molecular-weight organic thin films. Nature 425, 158-162 (2003).
4. 3 thin films with various Zr/Ti ratios by ink-jet printing. Jpn. J. Appl. Phys. 41, 6714-6717 (2002).
5. Tahar, R. B. H., Ban, T., Ohya, Y. & Takahashi, Y. Optical, structural, and electrical properties of indium oxide thin films prepared by the sol-gel method. J. Appl. Phys. 82, 865-870 (1997).
6. Yudasaka, I., Tanaka, H., Miyasaka, M., Inoue, S. & Shimoda, T. Poly-Si thin-film transistors using polysilazane-based spin-on glass for all dielectric layers. In 2004 SID International Symposium Digest of Technical Papers 964-967 (Society for Information Display, San Jose, 2004).
7. Furusawa, M. et al. InkJet-printed bus and address electrodes for plasma display. In 2002 SID International Symposium Digest of Technical Papers 753-755 (Society for Information Display, San Jose, 2002).
8. Sirringhaus, H. et al. High-resolution inkjet printing of all-polymer transistor circuits. Science 290, 2123-2126 (2000).
9. Kawase, T., Sirringhaus, H., Friend, R. H. & Shimoda, T. All-polymer thin film transistors fabricated by high-resolution ink-jet printing. In 2000 International Electron Device Meeting (IEDM) Tech. Digest 623-626 (2000).
10. Gelinck, G. H. et al. Flexible active-matrix displays and shift registers based on solution-processed organic transistors. Nature Mater. 3, 106-110 (2004).
11. Afzali, A., Dimitrakopoulos, C. D. & Breen, T. L. High-performance, solution-processed organic thin film transistors from a novel pentacene precursor. J. Am. Chem. Soc. 124, 8812-8813 (2002).
12. Ridley, B. A., Nivi, B. & Jacobson, J. M. All-inorganic field effect transistors fabricated by printing. Science 286, 746-749 (1999).
13. Mitzi, D. B., Kosbar, L. L., Murray, C. E., Copel, M. & Afzali, A. High-mobility ultrathin semiconducting films prepared by spin coating. Nature 428, 299-303 (2004).
14. Aoki, T. et al. Method of manufacturing device, device, and electronic apparatus. US Patent Application 0029364 (2004).
15. Shimoda, T. et al. Method for forming silicon film. US Patent 6541354 (2003).
16. n. J. Chem. Soc 125, 2291-2297 (1924).
17. x. J. Chem. Soc. Chem. Commun. 1496-1497 (1983).
18. Suzuki, M., Kotani, J., Gyobu, S., Kaneko, T. & Saegusa, T. Synthesis of sequence-ordered polysilane by anionic ring-opening polymerization of phenylnonamethycyclopentasilane. Macromolecules 27, 2360-2363 (1994).
19. Cypryk, M., Gupta, Y. & Matyjaszewski, K. Anionic ring-opening polymerization of 1,2,3,4-tetramethyl-1,2,3,4-tetraphenylcyclotetrasilane. J. Am. Chem. Soc. 113, 1046-1047 (1991).
20. Hengge, E. & Bauer, G. Cyclopentasilan, das erste unsubstituierte cyclische Siliciumhydrid. Angew. Chem. 85, 304-305 (1973).
21. Hengge, E. & Bauer, G. Darstellung und Eigenschaften von Cyclopentasilan. Monatsh. Chem. 106, 503-512 (1975).
22. Raabe, G. & Michl, J. Multiple bonding to silicon. Chem. Rev. 85, 419-509 (1985).
23. Sameshima, T., Usui, S. & Sekiya, M. XeCl excimer laser annealing used in the fabrication of poly-Si TFTs. IEEE Electron Device Lett. 7, 276-278 (1986).
24. Kitahara, K., Yamazaki, R., Kurosawa, T., Nakajima, K. & Moritani, A. Analysis of stress in laser-crystallized polysilicon thin films by Raman scattering spectroscopy. Jpn. J. Appl. Phys. 41, 5055-5059 (2002).
25. Chatgilialoglu, C. et al. Autoxidation of poly(hydrosilane)s. Organometallics 17, 2169-2176 (1998).
26. Morii, K. et al. Characterization of light-emitting polymer devices prepared by ink-jet printing. In Proc. 10th Int. Workshop on Inorganic and Organic Electroluminescence 357-360 (2000).
27. Morii, K., Masuda, T., Ishida, M., Hotta, S. & Shimoda, T. The direct patterning of crystalline organic-semiconductor films on a substrate by ink-jet printing. In Proc. Int. Conference on Synthetic Metals 126-127 (2004).