Fabrication of nano-hole array patterns on transparent conducting oxide layer using thermally curable nanoimprint lithography

Microelectronic Engineering

Volumn 85, Issue 5-6, 2008, Pages 830-833

  Byeon, Kyeong Jae ^a   Hwang, Seon Yong ^a   Lee, Heon ^a  

^a Korea University   (South Korea)

Author keywords

Indium tin oxide (ITO); Nanoimprint lithography (NIL); Patterned transparent electrode; Photonic crystals; Transparent conducting oxide (TCO) layer

Indexed keywords

CURING; ETCHING; INDIUM COMPOUNDS; INDUCTIVELY COUPLED PLASMA; MICROFABRICATION; NANOIMPRINT LITHOGRAPHY; PHOTONIC CRYSTALS;

INDIUM TIN OXIDE (ITO); PATTERNED TRANSPARENT ELECTRODES; TRANSPARENT CONDUCTING OXIDE (TCO) LAYER;

CONDUCTING POLYMERS;

ASSEMBLY; HOLES; LITHOGRAPHY;

EID: 44349135685     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2007.12.078     Document Type: Article

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