Fabricating high-density microarrays for retinal recording

Microelectronic Engineering

Volumn 67-68, Issue , 2003, Pages 520-527

  Mathieson, K ^a   Cunningham, W ^a   Marchal, J ^a   Melone, J ^a   Horn, M ^a   O'Shea, V ^a   Smith, K M ^a   Litke, A ^b   Chichilnisky, E J ^c   Rahman, M ^a  

^a UNIVERSITY OF GLASGOW   (United Kingdom)

^b UNIVERSITY OF CALIFORNIA SANTA CRUZ   (United States)

^c SALK INSTITUTE FOR BIOLOGICAL STUDIES   (United States)

Author keywords

Dry etching; ITO; Microelectrode arrays; Retinal recording

Indexed keywords

DRY ETCHING; ELECTRIC IMPEDANCE; ELECTROPLATING; PHOTOLITHOGRAPHY; REACTIVE ION ETCHING; VIDEO RECORDING; VIDEO SIGNAL PROCESSING;

RETINAL RECORDING;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 0038020136     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0167-9317(03)00109-6     Document Type: Conference Paper

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