Structural studies of titanium oxide films deposited with metalorganic decomposition

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 249, Issue 1-2 SPEC. ISS., 2006, Pages 540-543

  Padmanabhan, K ^a   Harvey, N E ^a   Kurel, Parashu ^a   Talagala, P ^a   Naik, R ^a   Auner, G W ^a   Naik, V M ^b   Suryanarayanan, R ^c   Thevuthasan, S ^d   Shutthanandan, V ^d  

^a WAYNE STATE UNIVERSITY   (United States)

^b UNIVERSITY OF MICHIGAN DEARBORN   (United States)

^c UNIVERSITÉ PARIS SACLAY   (France)

^d PACIFIC NORTHWEST NATIONAL LABORATORY   (United States)

Author keywords

Channeling; Epitaxy; Metalorganic decomposition; Thin films; TiO2

Indexed keywords

EPITAXIAL GROWTH; METALLORGANIC CHEMICAL VAPOR DEPOSITION; ORGANOMETALLICS; RAMAN SPECTROSCOPY; RUTHERFORD BACKSCATTERING SPECTROSCOPY; STOICHIOMETRY; TITANIUM OXIDES;

ETHYL HEXOXIDE; ION CHANNELING ANALYSIS; METALORGANIC DECOMPOSITION; NUCLEAR REACTION ANALYSIS;

THIN FILMS;

EID: 33745867292     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2006.03.048     Document Type: Article

References (10)

1. Prellier W., Fouchet A., and Mercey B. J. Phys.: Condens. Matter 15 (2003) 1583
2. Matsumoto Y., et al. Science 291 (2001) 854
3. Fukumura T., Toyosaki H., and Yamada Y. Semicond. Sci. Technol. 20 4 (2005) S103
4. Manivannan A., Seehra M.S., Majumdar S.B., and Katyar R.S. Appl. Phys. Lett. 83 (2003) 111
5. Griffin K.A., Pakhomov A.B., Wang C.M., Heald S.M., and Krishnan K.M. Phys. Rev. Lett. 94 (2005) 157204
6. Wang Y., Aponte M., Leon N., Ramos I., Furlan R., Evoy S., and Santiago-Avilé J.J. Semicond. Sci. Technol. 19 8 (2004) 1057
7. Hamdi A.H., Mantese J.V., Micheli A.L., Laugal R.C.O., Dungan D.F., Zhang Z.H., and Padmanabhan K.R. Appl. Phys. Lett. 51 (1987) 2152
8. Chen Y.L., Mantese J.V., Hamdi A.H., and Micheli A.L. J. Mater. Res. 4 (1989) 1064
9. Direct Online RBS Analysis and RBS SIM - Programs developed by S.S. Eskildson, K. Padmanabhan, Wayne State University, unpublished, 1989.
10. P. Kurel, P. Talagala, G. Lawes, R. Naik, G.W. Auner, V.M. Naik, R. Suryanarayanan, APS March Meeting, 2005, Poster # C1, 104.