Development of a micro-diaphragm pump with piezoelectric device

Annual IEEE Semiconductor Thermal Measurement and Management Symposium

Volumn , Issue , 2007, Pages 184-189

  Ma, H K ^a   Hou, B R ^a   Wu, H Y ^a   Lin, C Y ^a   Gao, J J ^a  

^a NATIONAL TAIWAN UNIVERSITY   (Taiwan)

Author keywords

Liquid cooling; Micro diaphragm pump; Piezoelectric effect; Valve

Indexed keywords

HARMONIC ANALYSIS; PIEZOELECTRIC DEVICES; PIEZOELECTRICITY; RESONANCE;

LIQUID-COOLING; MICRO-DIAPHRAGM PUMPS;

PUMPS;

EID: 34548091261     PISSN: 10652221     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/STHERM.2007.352421     Document Type: Conference Paper

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