Structural perfection of laterally overgrown GaN layers grown in polar- and non-polar directions

Journal of Materials Science: Materials in Electronics

Volumn 19, Issue 8-9, 2008, Pages 815-820

  Liliental Weber, Zuzanna ^a   Ni, X ^b   Morkoc, H ^a  

^a LAWRENCE BERKELEY NATIONAL LABORATORY   (United States)

^b Virginia Commonwealth University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COALESCENCE; DENSITY (SPECIFIC GRAVITY); GROWTH RATE; SUBSTRATES; TEMPERATURE; TRANSMISSION ELECTRON MICROSCOPY; WINGS;

NON-POLAR SUBSTRATES; POLAR SUBSTRATES;

GALLIUM NITRIDE;

EID: 44149109450     PISSN: 09574522     EISSN: 1573482X     Source Type: Journal    
DOI: 10.1007/s10854-007-9472-5     Document Type: Conference Paper

References (21)

1. 1. S. Yoshida S. Misawa S. Gonda 1983 J. Vac. Sci. Technol. B1 250 S. Yoshida, S. Misawa, S. Gonda, J. Vac. Sci. Technol. B1, 250 (1983)
2. 2. H. Amano N. Sawaki I. Akasaki Y. Toyoda 1986 Appl. Phys. Lett. 48 353 10.1063/1.96549 1:CAS:528:DyaL28XpvFOisw%3D%3D H. Amano, N. Sawaki, I. Akasaki, Y. Toyoda, Appl. Phys. Lett. 48, 353 (1986)
3. 3. I. Akasaki H. Amano M. Kito K. Hiramatsu 1991 J. Lumin. 48/49 666 10.1016/0022-2313(91)90215-H I. Akasaki, H. Amano, M. Kito, K. Hiramatsu, J. Lumin. 48/49, 666 (1991)
4. 4. S. Nakamura M. Senoh T. Mukai 1991 J. Appl. Phys. 30 L1709 S. Nakamura, M. Senoh, T. Mukai, J. Appl. Phys. 30, L1709 (1991)
5. 5. S. Nakamura M. Senoh S. Nagahama N. Iwasa T. Yamada T. Matsushida Y. Sugimoto H. Kiyogu 1997 Appl. Phys. Lett. 70 1417 10.1063/1.118593 1:CAS:528:DyaK2sXhvFels7g%3D S. Nakamura, M. Senoh, S. Nagahama, N. Iwasa, T. Yamada, T. Matsushida, Y. Sugimoto, H. Kiyogu, Appl. Phys. Lett. 70, 1417 (1997)
6. 6. B.W. Lim Q.C. Chen J.Y. Yang M.A. Khan 1996 Appl. Phys. Lett. 68 3761 10.1063/1.115998 1:CAS:528:DyaK28XjvVGlur8%3D B.W. Lim, Q.C. Chen, J.Y. Yang, M.A. Khan, Appl. Phys. Lett. 68, 3761 (1996)
7. 7. T. Nishida N. Kobayashi 2001 Phys. Stat. Sol. A188 113 10.1002/1521-396X(200111)188:1<113::AID-PSSA113>3.0.CO;2-C T. Nishida, N. Kobayashi, Phys. Stat. Sol. A188, 113 (2001)
8. 8. F. Bernardini V. Fiorentini 1998 Phys. Rev. B57 9427 F. Bernardini, V. Fiorentini, Phys. Rev. B57, 9427 (1998)
9. 9. D.N. Zakharov Z. Liliental-Weber B. Wagner Z.J. Reitmeier E.A. Preble R.F. Davis 2005 Phys. Rev. B71 235334 D.N. Zakharov, Z. Liliental-Weber, B. Wagner, Z.J. Reitmeier, E.A. Preble, R.F. Davis, Phys. Rev. B71, 235334 (2005)
10. 10. S. Karpov Y.H. Makarov 2002 Appl. Phys. Lett. 81 4721 10.1063/1.1527225 1:CAS:528:DC%2BD38XpsFCitLY%3D S. Karpov, Y.H. Makarov, Appl. Phys. Lett. 81, 4721 (2002)
11. 11. A. Sakai H. Sunakawa A. Usui 1997 Appl. Phys. Lett. 71 2259 10.1063/1.120044 1:CAS:528:DyaK2sXmvV2ls7k%3D A. Sakai, H. Sunakawa, A. Usui, Appl. Phys. Lett. 71, 2259 (1997)
12. 12. Z. Liliental-Weber M. Benamara W. Swider J. Washburn J. Park P.A. Grudowski C.J. Eiting R.D. Dupuis 1998 MRS Internet J. Nitride Semicond. Res. 4S1 G46 Z. Liliental-Weber, M. Benamara, W. Swider, J. Washburn, J. Park, P.A. Grudowski, C.J. Eiting, R.D. Dupuis, MRS Internet J. Nitride Semicond. Res. 4S1, G4.6 (1998)
13. 13. Z. Liliental-Weber D. Cherns 2001 J. Appl. Phys. 89 7833 10.1063/1.1370366 1:CAS:528:DC%2BD3MXkt1agt70%3D Z. Liliental-Weber, D. Cherns, J. Appl. Phys. 89, 7833 (2001)
14. 14. T. Zheleva S. Smith D. Thomson K. Linthicum P. Rajagopal R.F. Davis 1999 J. Electr. Mat. 28 4 L5 10.1007/s11664-999-0239-z 1:CAS:528:DyaK1MXitlantr8%3D T. Zheleva, S. Smith, D. Thomson, K. Linthicum, P. Rajagopal, R.F. Davis, J. Electr. Mat. 28 (4), L5 (1999)
15. 15. P. Fini H. Marchand J.P. Ibbetson B. Moran L. Zhao S.P. Denbaars J.S. Speck U. Mishra 1999 Mater. Res. Soc. Symp. Proc. 572 315 1:CAS:528:DyaK1MXmsFGhsLw%3D P. Fini, H. Marchand, J.P. Ibbetson, B. Moran, L. Zhao, S.P. Denbaars, J.S. Speck, U. Mishra, Mater. Res. Soc. Symp. Proc. 572, 315 (1999)
16. 16. R.F. Davis T. Gehrke K.J. Linthicum T.S. Zhelewa E.A. Preble P. Rajagopal C.A. Zorman M. Mehregany 2001 J. Cryst. Growth 225 134 10.1016/S0022-0248(01)00836-3 1:CAS:528:DC%2BD3MXjvV2mu70%3D R.F. Davis, T. Gehrke, K.J. Linthicum, T.S. Zhelewa, E.A. Preble, P. Rajagopal, C.A. Zorman, M. Mehregany, J. Cryst. Growth 225, 134 (2001)
17. 17. Z. Liliental-Weber, D. Zakharov, B. Wagner, R.F. Davis, Proceedings of SPIE-The International Society for Optical Engineering, vol. 6121 (SPIE, Bellingham, WA, 2006), p. 612101
18. 18. M.D. Craven S.H. Lim F. Wu J.S. Speck S.P. Denbaars 2002 Appl. Phys. Lett. 81 469 10.1063/1.1493220 1:CAS:528:DC%2BD38XltVOisLY%3D M.D. Craven, S.H. Lim, F. Wu, J.S. Speck, S.P. Denbaars, Appl. Phys. Lett. 81, 469 (2002)
19. 19. T. Zheleva S. Smith D. Thomson K. Linthicum P. Rajagopal E. Carlson W. Ashmawi R.F. Davis 1999 MRS Internet J. Nitride Semicond. Res. 4S1 G49 T. Zheleva, S. Smith, D. Thomson, K. Linthicum, P. Rajagopal, E. Carlson, W. Ashmawi, R.F. Davis, MRS Internet J. Nitride Semicond. Res. 4S1, G49 (1999)
20. 20. R.F. Davis T. Gehrke K.J. Linthicum T. Zhelewa E.A. Preble P. Rajagopal C.A. Zorman M.J. Mehregany 2001 J. Cryst. Growth 225 134 10.1016/S0022-0248(01)00836-3 1:CAS:528:DC%2BD3MXjvV2mu70%3D R.F. Davis, T. Gehrke, K.J. Linthicum, T. Zhelewa, E.A. Preble, P. Rajagopal, C.A. Zorman, M.J. Mehregany, J. Cryst. Growth 225, 134 (2001)
21. 21. X. Ni Ü. Özgür Y. Fu N. Biyikli J. Xie A.A. Baski H. Morkoç Z. Liliental-Weber 2006 Appl. Phys. Lett. 89 262105 10.1063/1.2423328 X. Ni, Ü. Özgür, Y. Fu, N. Biyikli, J. Xie, A.A. Baski, H. Morkoç, Z. Liliental-Weber, Appl. Phys. Lett. 89, 262105 (2006)