Solving partial differential equations on irregular domains with moving interfaces, with applications to superconformal electrodeposition in semiconductor manufacturing

Journal of Computational Physics

Volumn 227, Issue 13, 2008, Pages 6411-6447

  Sethian, J A ^a   Shan, Ying ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

Conservative material level set methods; Immersed interface methods; Level set methods; Multigrid methods; Semiconductor process; Superconformal electrodeposition

Indexed keywords

DROP BREAKUP; ELECTRODEPOSITION; ELECTRODES; ELECTROLYTES; INTERFACES (MATERIALS); LEVEL MEASUREMENT; LINEAR SYSTEMS;

CONSERVATIVE MATERIAL LEVEL SET METHOD; IMMERSED INTERFACE METHOD; IRREGULAR DOMAINS; LEVEL SET METHOD; MOVING INTERFACE; MULTIGRID METHODS; SEMICONDUCTOR MANUFACTURING; SEMICONDUCTOR PROCESS; SUPERCONFORMAL ELECTRODEPOSITION;

NUMERICAL METHODS;

EID: 44149097105     PISSN: 00219991     EISSN: 10902716     Source Type: Journal    
DOI: 10.1016/j.jcp.2008.03.001     Document Type: Article

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