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Volumn 103, Issue 9, 2008, Pages

Effect of silicon interstitials on Cu precipitation in n -type Czochralski silicon

Author keywords

[No Author keywords available]

Indexed keywords

DISLOCATIONS (CRYSTALS); HEAT TREATMENT; OPTICAL MICROSCOPY; OXIDATION; PRECIPITATION (CHEMICAL); SILICON; STRESS ANALYSIS; TRANSMISSION ELECTRON MICROSCOPY;

EID: 43949124178     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2908215     Document Type: Article
Times cited : (11)

References (25)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.