Minienvironments and thermal effects

10th Annual IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop, ASMC 1999

Volumn , Issue , 1999, Pages 432-439

  Schliesser, J ^a   Staudt Fischbach, P ^b  

^a FRAUNHOFER INSTITUTE FOR MANUFACTURING ENGINEERING AND AUTOMATION IPA   (Germany)

^b Vishay   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AIR CLEANERS; AIR PURIFICATION; CLEAN ROOMS; LABORATORIES; MANUFACTURE; SEMICONDUCTOR DEVICE MANUFACTURE;

AIR PURIFICATION SYSTEMS; CLEANROOM TECHNOLOGY; CONVENTIONAL SYSTEMS; FILTER TECHNOLOGY; FUNCTIONAL UNITS; PROCESS CHAMBERS; PROCESS EQUIPMENTS; PRODUCTION FACILITY;

SUBSTRATES;

EID: 84963711121     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ASMC.1999.798309     Document Type: Conference Paper

References (8)

1. Schliesser J: "Designing Methods To Obtain A Less Contaminated Airflow At The Product Level. " 1994 Proceedings of the 40th Annual Technical Meeting of the Institute of Environmental Sciences (IES) Chicago, Illinois, USA
2. Merker G. P. : "Konvektive Wmeilbertragung" Springer Verlag, Berlin /Heidelberg /New York, 1987
3. Baehr H. D. ; Stephan K. : "Wme-und Stoffilbertragung" Springer Verlag, Berlin /Heidelberg /New York, 1994
4. Schliesser, J. ; Klumpp, B. : "Design Methods and Recommended Practices for Developing a Minienvironment System" 13∗International Symposium of Contamination Control. The Hague, 1996, S. 217-224
5. SchlieOer, J. : "Untersuchungen von Reinheitssystemen zur Herstellung von Halbleiterprodukten" Berlin u. a. : Springer 1993, (IPAIAO Forschung und Praxis, Bd. 281) Zugl. Stuttgart, Univ. , Diss. , 1998.
6. Albring, W: "Angewandte Stromungslehre" 4. Aufl. Dresden: Theodor Steinkopf, 1970
7. Schlichting, H. : "Grenzschicht-Theorie"Karlsruhe: G. Braun, 1982
8. Borner, H. : "Ober den Warme-und Stoffilbergang an umspillten Einzelkorpern bei Uberlagerung von freier und erzwungenerStrOmung" VDI-Forschungsheft Nr. 5 12. Dilsseldorf. VDI, 1965