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Volumn 130-131, Issue SPEC. ISS., 2006, Pages 340-345

A novel surface micromachining process to fabricate AlN unimorph suspensions and its application for RF resonators

Author keywords

Aluminum nitride (AlN); Piezoelectric unimorph suspension; Thin film bulk acoustic resonator (TFBAR); Wet anisotropic etching

Indexed keywords

ALUMINUM NITRIDE; ANISOTROPY; ETCHING; RESONATORS; SCATTERING PARAMETERS; SURFACE STRUCTURE; SUSPENSIONS (FLUIDS);

EID: 33745851482     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2005.09.029     Document Type: Article
Times cited : (28)

References (11)
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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.