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Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 22, Issue 4, 2004, Pages 1383-1387

Fabrication and characterization of a capacitive micromachined shunt switch

(5) Firebaugh, Samara L a Charles, Harry K b Edwards, Richard L b Keeney, Allen C b Wilderson, Samuel F b

a UNITED STATES NAVAL ACADEMY (United States)

b JOHNS HOPKINS UNIVERSITY APPLIED PHYSICS LABORATORY (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATION VOLTAGE; CAPACITIVE MICROMACHINED SHUNT SWITCHES; ELECTROSTATIC FORCE;

CAPACITANCE; CHARACTERIZATION; DIELECTRIC MATERIALS; ELECTRIC POTENTIAL; ELECTROSTATICS; FABRICATION; FINITE ELEMENT METHOD; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; RESIDUAL STRESSES; SIGNAL PROCESSING;

ELECTRIC SWITCHES;

EID: 4344663115 PISSN: 07342101 EISSN: None Source Type: Journal
DOI: 10.1116/1.1690255 Document Type: Conference Paper

Times cited : (5)

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