Microstructural characterization of low dielectric silica xerogel film

Thin Solid Films

Volumn 462-463, Issue SPEC. ISS., 2004, Pages 168-171

  He, Z W ^a   Zhen, C M ^a   Liu, X Q ^a   Lan, W ^a   Xu, D Y ^a   Wang, Y Y ^a  

^a LANZHOU UNIVERSITY   (China)

Author keywords

Low dielectric constant; Molecular template; Silica xerogel film

Indexed keywords

LOW DIELECTRIC CONSTANT; MOLECULAR TEMPLATES; SILICA XEROGEL FILMS;

CATALYST ACTIVITY; FOURIER TRANSFORM INFRARED SPECTROSCOPY; PERMITTIVITY; POROSITY; POTENTIOMETERS (RESISTORS); SCANNING ELECTRON MICROSCOPY; SILICA GEL; SOL-GELS; SPIN COATING; SYNTHESIS (CHEMICAL); THERMOGRAVIMETRIC ANALYSIS;

DIELECTRIC FILMS;

EID: 4344646326     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2004.05.068     Document Type: Article

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