Ambient-dried low dielectric SiO2 aerogel thin film

Journal of Non-Crystalline Solids

Volumn 221, Issue 2-3, 1997, Pages 151-156

  Yang, Hee Sun ^a   Choi, Se Young ^a   Hyun, Sang Hoon ^a   Park, Hyung Ho ^a   Hong, Jung Kyun ^a  

^a Yonsei University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

CONDENSATION; DIELECTRIC FILMS; DIFFERENTIAL THERMAL ANALYSIS; FOURIER TRANSFORM INFRARED SPECTROSCOPY; PERMITTIVITY; REFRACTIVE INDEX; SILICON; SOL-GELS; SURFACE TREATMENT; SYNTHESIS (CHEMICAL); THERMAL EFFECTS; THIN FILMS;

SILICA AEROGEL; SPIN COATING; TRIMETHYLCHLOROSILANE;

SILICA GEL;

EID: 0031340787     PISSN: 00223093     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0022-3093(97)00335-9     Document Type: Article

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