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Volumn 92, Issue 18, 2008, Pages

Deposited debris characteristics and its reduction of a laser-produced plasma extreme ultraviolet source using a colloidal tin dioxide jet target

Author keywords

[No Author keywords available]

Indexed keywords

COLLOIDS; DEPOSITION; EXTREME ULTRAVIOLET LITHOGRAPHY; IRRADIATION; LASER HEATING; NANOPARTICLES; TIN DIOXIDE; VAPORIZATION;

COLLOIDAL DEBRIS; EXTREME ULTRAVIOLET SOURCES; TOTAL LASER ENERGY;

LASER PRODUCED PLASMAS;

EID: 43349092805 PISSN: 00036951 EISSN: None Source Type: Journal
DOI: 10.1063/1.2924302 Document Type: Article

Times cited : (11)

References (10)

1
- 0000130079
- C. W. Gwyn, R. Stulen, D. Sweeney, and D. Attwood, J. Vac. Sci. Technol. B 16, 3142 (1998).
- (1998) J. Vac. Sci. Technol. B , vol.16 , pp. 3142
- Gwyn, C.W.¹ Stulen, R.² Sweeney, D.³ Attwood, D.⁴

2
- 43349098536
- EUV Source Workshop, Barcelona, October, (unpublished).
- A. Miyake, H. Kanazawa, V. Banine, and K. Suzuki, EUV Source Workshop, Barcelona, October, 2006 (unpublished).
- (2006)
- Miyake, A.¹ Kanazawa, H.² Banine, V.³ Suzuki, K.⁴

3
- 0942289220
- H. Komori, T. Abe, T. Suganuma, Y. Imai, Y. Sugimoto, H. Someya, H. Hoshino, G. Soumagne, Y. Takabayashi, H. Mizoguchi, A. Endo, K. Toyoda, and Y. Horiike, J. Vac. Sci. Technol. B 21, 2843 (2003).
- (2003) J. Vac. Sci. Technol. B , vol.21 , pp. 2843
- Komori, H.¹ Abe, T.² Suganuma, T.³ Imai, Y.⁴ Sugimoto, Y.⁵ Someya, H.⁶ Hoshino, H.⁷ Soumagne, G.⁸ Takabayashi, Y.⁹ Mizoguchi, H.¹⁰ Endo, A.¹¹ Toyoda, K.¹² Horiike, Y.¹³

4
- 20844446307
- Y. Shimada, H. Nishimura, M. Nakai, K. Hashimoto, M. Yamaura, Y. Tao, K. Shigemori, T. Okuno, K. Nishihara, T. Kawamura, A. Sunahara, T. Nishikawa, A. Sasaki, K. Nagai, T. Norimatsu, S. Fujioka, S. Uchida, N. Miyanaga, Y. Izawa, and C. Yamanaka, Appl. Phys. Lett. 86, 051501 (2005).
- (2005) Appl. Phys. Lett. , vol.86 , pp. 051501
- Shimada, Y.¹ Nishimura, H.² Nakai, M.³ Hashimoto, K.⁴ Yamaura, M.⁵ Tao, Y.⁶ Shigemori, K.⁷ Okuno, T.⁸ Nishihara, K.⁹ Kawamura, T.¹⁰ Sunahara, A.¹¹ Nishikawa, T.¹² Sasaki, A.¹³ Nagai, K.¹⁴ Norimatsu, T.¹⁵ Fujioka, S.¹⁶ Uchida, S.¹⁷ Miyanaga, N.¹⁸ Izawa, Y.¹⁹ Yamanaka, C.²⁰ more..

5
- 33750032581
- T. Ando, S. Fujioka, H. Nishimura, N. Ueda, Y. Yasuda, K. Nagai, T. Norimatsu, M. Murakami, K. Nishihara, N. Miyanaga, Y. Izawa, K. Mima, and A. Sunahara, Appl. Phys. Lett. 89, 151501 (2006).
- (2006) Appl. Phys. Lett. , vol.89 , pp. 151501
- Ando, T.¹ Fujioka, S.² Nishimura, H.³ Ueda, N.⁴ Yasuda, Y.⁵ Nagai, K.⁶ Norimatsu, T.⁷ Murakami, M.⁸ Nishihara, K.⁹ Miyanaga, N.¹⁰ Izawa, Y.¹¹ Mima, K.¹² Sunahara, A.¹³

6
- 2342535109
- M. Richardson, C.-S. Koay, K. Takenoshita, C. Keyser, and M. Al-Rabban, J. Vac. Sci. Technol. B 22, 785 (2004).
- (2004) J. Vac. Sci. Technol. B , vol.22 , pp. 785
- Richardson, M.¹ Koay, C.-S.² Takenoshita, K.³ Keyser, C.⁴ Al-Rabban, M.⁵

7
- 2142714542
- P. A. C. Jansson, B. A. M. Hansson, O. Hemberg, M. Otendal, A. Holmberg, J. de Groot, and H. M. Hertz, Appl. Phys. Lett. 84, 2256 (2004).
- (2004) Appl. Phys. Lett. , vol.84 , pp. 2256
- Jansson, P.A.C.¹ Hansson, B.A.M.² Hemberg, O.³ Otendal, M.⁴ Holmberg, A.⁵ De Groot, J.⁶ Hertz, H.M.⁷

8
- 33646873914
- T. Higashiguchi, N. Dojyo, M. Hamada, W. Sasaki, and S. Kubodera, Appl. Phys. Lett. 88, 201503 (2006).
- (2006) Appl. Phys. Lett. , vol.88 , pp. 201503
- Higashiguchi, T.¹ Dojyo, N.² Hamada, M.³ Sasaki, W.⁴ Kubodera, S.⁵

9
- 35248853764
- T. Higashiguchi, M. Kaku, M. Katto, and S. Kubodera, Appl. Phys. Lett. 91, 151503 (2007).
- (2007) Appl. Phys. Lett. , vol.91 , pp. 151503
- Higashiguchi, T.¹ Kaku, M.² Katto, M.³ Kubodera, S.⁴

10
- 33645718452
- H. Komori, Y. Ueno, H. Hoshino, T. Ariga, G. Soumagne, A. Endo, and H. Mizoguchi, Appl. Phys. B: Lasers Opt. 83, 213 (2006).
- (2006) Appl. Phys. B: Lasers Opt. , vol.83 , pp. 213
- Komori, H.¹ Ueno, Y.² Hoshino, H.³ Ariga, T.⁴ Soumagne, G.⁵ Endo, A.⁶ Mizoguchi, H.⁷

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