Fabrication of piezoelectric micro-cantilevers in domain-engineered LiNbO3 single crystals

Journal of Micromechanics and Microengineering

Volumn 12, Issue 1, 2002, Pages 53-57

  Sones, Collin ^a   Mailis, Sakellaris ^a   Apostolopoulos, Vasilis ^a   Barry, Ian E ^a   Gawith, Corin ^a   Smith, Peter G R ^a   Eason, Robert W ^a  

^a UNIVERSITY OF SOUTHAMPTON   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC FIELD EFFECTS; FERROELECTRIC MATERIALS; LITHIUM NIOBATE; PHOTOLITHOGRAPHY; PIEZOELECTRICITY;

DIRECT BONDING; DOMAIN-ORIENTED DIFFERENTIAL ETCHING; ELECTRIC FIELD POLING; MICRO-CANTILEVERS; PHOTOLITHOGRAPHIC PATTERNING;

CANTILEVER BEAMS;

EID: 0036153078     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/12/1/308     Document Type: Article

References (15)

1. Microelectromechanical membrane switches on silicon
2. Thermal analysis using a micromechanical calorimeter
3. Remote optical detection using microcantilevers
4. Vapor detection using resonating microcantilevers
5. Manufacture of micromechanical scanning tunnelling microscopes for observation of the tip apex in a transmission-electron microscope
6. Characteristics of sol-gel derived PZT thin films with lead oxide cover layers and lead titanate interlayers
7. Self-excited piezoelectric PZT microcantilevers for dynamic SFM-with inherent sensing and actuating capabilities
8. Microstructuring of lithium niobate using differential etch-rate between inverted and non-inverted ferroelectric domains
9. Control of domain structures in lithium tantalate using interferometric optical patterning
10. 3
11. 3
12. Fabrication of surface relief gratings on lithium niobate by combined UV laser and wet etching
13. Diversity and feasibility of direct bonding-a survey of a dedicated optical technology
14. Fabrication of ridge waveguides in lithium niobate by differential etching following spatially selective domain inversion