Network properties and acid degradability of epoxy-based SU-8 resists containing reactive gamma-butyrolactone

Sensors and Actuators, B: Chemical

Volumn 131, Issue 2, 2008, Pages 609-620

  Zhang, Jun ^a   Chan Park, Mary B ^a   Li, Chang Ming ^a  

^a Nanyang Technological University   (Singapore)

Author keywords

Acid degradation; Gamma butyrolactone; Kinetics; Network; Reactive solvent; SU 8

Indexed keywords

CHEMICAL REACTIVITY; DEGRADATION; EPOXY RESINS; FOURIER TRANSFORM INFRARED SPECTROSCOPY; GAS CHROMATOGRAPHY; IRRADIATION; MASS SPECTROMETRY; MONOMERS; NUCLEAR MAGNETIC RESONANCE; ULTRAVIOLET DEVICES;

ACID DEGRADATION; GAMMA BUTYROLACTONE (GBL); REACTIVE SOLVENTS;

SOLVENTS;

EID: 42949111640     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2007.12.048     Document Type: Article

References (38)

1. Ho C.-H., Chin K.-P., Yang C.-R., Wu H.-M., and Chen S.-L. Ultrathick SU-8 mold formation and removal, and its application to the fabrication of LIGA-like micromotors with embedded roots. Sens. Actuat. A: Phys. 102 (2002) 130-138
2. Agarwal M., Gunasekaran R.A., Coane P., and Varahramyan K. Scum-free patterning of SU-8 resist for electroforming applications. J. Micromech. Microeng. 15 (2005) 130-135
3. Yagci Y., and Schnabel W. On the mechanism of photoinitiated cationic polymerization in the presence of polyols. Angew. Makromol. Chem. 270 (1999) 38-41
4. Crivello J.V., and Narayan R. Novel epoxynorbornane monomers. 1. Synthesis and characterization. Macromolecules 29 (1996) 433-438
5. Feng R., and Farris R.J. Influence of processing conditions on the thermal and mechanical properties of SU-8 negative photoresist coatings. J. Micromech. Microeng. 13 (2003) 80-88
6. Mas C., Ramis X., Salla J.M., Mantecon A., and Serra A. Copolymerization of diglycidyl ether of bisphenol A with gamma-butyrolactone catalyzed by ytterbium triflate: shrinkage during curing. J. Polym. Sci. A: Polym. Chem. 41 (2003) 2794-2808
7. Ramis X., Salla J.M., Mas C., Mantecon A., and Serra A. Kinetic study by FTIR, TMA, and DSC of the curing of a mixture of DGEBA resin and gamma-butyrolactone catalyzed by ytterbium triflate. J. Appl. Polym. Sci. 92 (2004) 381-393
8. Lorenz H., Laudon M., and Renaud P. Mechanical characterization of a new high-aspect-ratio near UV-photoresist. Microelectron. Eng. 41-42 (1998) 371-374
9. Hossenlopp J., Jiang L.H., Cernosek R., and Josse F. Characterization of epoxy resin (SU-8) film using thickness-shear mode (TSM) resonator under various conditions. J. Polym. Sci. B: Polym. Phys. 42 (2004) 2373-2384
10. Ling Z.G., Lian K., and Zhang J. Characterization and application of PAG diluted SU-8. Int. J. Comput. Eng. Sci. 4 (2003) 529-532
11. Zhang J., Chan-Park M.B., and Conner S.R. Effect of exposure dose on the replication fidelity and profile of very high aspect ratio microchannels in SU-8. Lab Chip 4 (2004) 646-653
12. Tang W., Li X.G., and Yan D.Y. Thermal decomposition kinetics of thermotropic copolyesters made from trans-p-hydroxycinnamic acid and p-hydroxybenzoic acid. J. Appl. Polym. Sci. 91 (2004) 445-454
13. Shaw J.M., Gelorme J.D., LaBianca N.C., Conley W.E., and Holmes S.J. Negative photoresists for optical lithography. IBM J. Res. Dev. 41 (1997) 81-94
14. Fukuzaki H., Aiba Y., Yoshida M., Asano M., and Kumakura M. Direct copolymerization of l-lactic acid with gamma-butyrolactone in the absence of catalysts. Makromol. Chem.-Macromol. Chem. Phys. 190 (1989) 1553-1559
15. Duda A., Penczek S., Dubois P., Mecerreyes D., and Jerome R. Oligomerization and copolymerization of gamma-butyrolactone-a monomer known as unable to homopolymerize. 1. Copolymerization with epsilon-caprolactone. Macromol. Chem. Phys. 197 (1996) 1273-1283
16. Fedtke M., Haufe J., Kahlert E., and Muller G. Cationic copolymerization of phenyl glycidyl ether with lactones-characterization of the reaction mixture with chromatographic methods. Angew. Makromol. Chem. 255 (1998) 53-59
17. Tavares M.I.B., D'Almeida J.R.M., and Monteiro S.N. C-13 solid-state NMR analysis of the DGEBA/TETA epoxy system. J. Appl. Polym. Sci. 78 (2000) 2358-2362
18. Woo E.M., Huang Y.P., Chang L.L., Kao H.M., Wu R.R., and Su C.C. Model compound study on network-forming reactions between poly(4-vinyl phenol) and an epoxy. J. Macromol. Sci.: Phys. B43 (2004) 365-383
19. Dean J.A. Lange's Handbook of Chemistry. 15th ed. (1999), McGraw-Hill Inc.
20. Chew S.L., and Meyers J.A. Identification and quantitation of gamma-hydroxybutyrate (NaGHB) by nuclear magnetic resonance spectroscopy. J. For. Sci. 48 (2003) 292-298
21. Silva E.P.D., Tavares M.I.B., Fraga L.A., and Kaplan M.A.C. Evaluation of the diethylene glycol bis(allyl carbonate)/acrylic acid copolymer behavior by solid-state C-13 NMR. J. Appl. Polym. Sci. 96 (2005) 740-745
22. Mowery D.M., Assink R.A., Derzon D.K., Klamo S.B., Clough R.L., and Bernstein R. Solid-state C-13 NMR investigation of the oxidative degradation of selectively labeled polypropylene by thermal aging and gamma-irradiation. Macromolecules 38 (2005) 5035-5046
23. Kurosu H., and Chen Q. Structural studies of polymer blends by solid-state NMR. Annu. Rep. NMR Spectrosc. 52 (2004) 167-200
24. Material Safety Data Sheet for SU-8, MicroChem Corp.
25. Chatterjee K., Hazra A., Dollimore D., and Alexander K.S. Estimating vapor pressure curves by thermogravimetry: a rapid and convenient method for characterization of pharmaceuticals. Eur. J. Pharm. Biopharm. 54 (2002) 171-180
26. Hofman A., Szymanski R., Slomkowski S., and Penczek S. Structure of active species in the cationic polymerization of beta-propiolactone and epsilon-caprolactone. Makromol. Chem.-Macromol. Chem. Phys. 185 (1984) 655-667
27. Mas C., Mantecon A., Serra A., Ramis X., and Salla J.M. Improved thermosets obtained from cycloaliphatic epoxy resins and gamma-butyrolactone with lanthanide triflates as initiators. I. Study of curing by differential scanning calorimetry and Fourier transform infrared. J. Polym. Sci. A: Polym. Chem. 43 (2005) 2337-2347
28. 13C NMR spectroscopy, and dynamic mechanical experiments. Macromolecules 34 (2001) 4051-4060
29. Lopez J., Ramirez C., Torres A., Abad M.J., Barral L., Cano J., and Diez F.J. Isothermal curing by dynamic mechanical analysis of three epoxy resin systems: gelation and vitrification. J. Appl. Polym. Sci. 83 (2002) 78-85
30. Teil H., Page S.A., Michaud V., and Manson J.A.E. TTT-cure diagram of an anhydride-cured epoxy system including gelation, vitrification, curing kinetics model, and monitoring of the glass transition temperature. J. Appl. Polym. Sci. 93 (2004) 1774-1787
31. Aronhime M.T., and Gillham J.K. In: Dusek K. (Ed). Advances in Polymer Science vol. 78 (1986), Springer-Verlag, New York
32. DiBenedetto A.T. Prediction of the glass transition temperature of polymers: a model based on the principle of corresponding states. J. Polym. Sci. B: Polym. Phys. 25 (1987) 1949-1969
33. Pascault J.P., and Williams R.J.J. Glass-transition temperature versus conversion relationships for thermosetting polymers. J. Polym. Sci. B: Polym. Phys. 28 (1990) 85-95
34. Degrand H., Cazaux F., Coqueret X., Defoort B., Boursereau F., and Larnac G. Thermal effects on the network structure of diglycidylether of bisphenol-A polymerized by electron-beam in the presence of an iodonium salt. Radiat. Phys. Chem. 68 (2003) 885-891
35. Sensu Y., Sekiguichi A., Kono Y., Mori S., Honda N., and Weber W.D. Profile simulation of SU-8 thick film resist. J. Photopolym. Sci. Technol. 18 (2005) 125-132
36. Muggli D.S., Burkoth A.K., and Anseth K.S. cross-linked polyanhydrides for use in orthopedic applications: degradation behavior and mechanics. J. Biomed. Mater. Res. 46 (1999) 271-278
37. Lo W.H., and Yu J. Effects of the energy dissipation rate and surface erosion on the biodegradation of poly(hydroxybutyrate-co-hydroxyvalerate) and its blends with synthetic polymers in an aquatic medium. J. Appl. Polym. Sci. 83 (2002) 1036-1045
38. Yu J. Biodegradation-based polymer surface erosion and surface renewal for foul-release at low ship speeds. Biofouling 19 (2003) 83-90